An acceleration detector and detection method based on resonant light tunneling effect
A technology of tunneling effect and acceleration, which is applied in speed/acceleration/shock measurement, acceleration measurement, instruments, etc., which can solve problems such as increasing the difficulty of processing technology, bending and deformation of conductive film, and affecting the measurement accuracy of accelerometers
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Embodiment 1
[0065] Such as Figure 1-3 As shown, an acceleration detector based on resonant light tunneling effect, including a fixed frame 1, an elastic cantilever beam 2 and a mass block 3,
[0066] The mass block 3 is composed of a semi-cylindrical unit 4, a cuboid unit 5 and a resonance unit 6. The number of the semi-cylindrical unit 4 and the cuboid unit 5 is two, and the resonance unit 6 and two cuboid units 5 are connected to form an I-shaped structure. The two cuboid units 5 are two parallel beams of I-shaped structure, the square faces of the two semi-cylindrical units 4 are opposite and connected by the I-shaped structure, the resonance unit 6 is parallel to the square faces of the semi-cylindrical unit 4; the semi-cylindrical unit 4. Two gaps are formed between the cuboid unit 5 and the resonant unit 6 to form two resonant cavities; the mass block 3 is formed by etching an oblong silicon chip;
[0067] There are four elastic cantilever beams 2, four elastic cantilever beams 2 ...
Embodiment 2
[0070] Select the wavelength λ of the incident light to be 1550nm, the angle between the direction of the incident light and the positive direction of the X-axis is always β, and the incident light is P-polarized light; the width of the resonance unit 6 is g λ =15.622μm, air layer width d λ =2280nm, the refractive index of air is 1.
[0071] Since the quality block is made of silicon, the refractive index of silicon is 3.42, so the critical angle θ is obtained according to Snell's law of refraction c is 17.0016 degrees, and this embodiment selects the initial incident angle as α 0 It is 17.9516 degrees, and the variation range of displacement is controlled within 150nm.
[0072] According to the above conditions, through simulation calculation, the change curve (fitting curve) of light transmission intensity T with angle change Δθ is as follows Figure 7 As shown, the change curve of the light transmission intensity T with the displacement ΔH is as follows Figure 8 shown....
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