An acceleration detector and detection method based on resonant light tunneling effect

Abstract

The invention relates to an acceleration detector based on the resonance light tunneling effect and a detection method. According to the acceleration detector, the high-resolution characteristic of the resonance light tunneling effect principle is utilized to measure acceleration, and the acceleration detector is in a novel structure. The acceleration detector based on the resonance light tunneling effect comprises a fixing frame, an elastic cantilever beam and a quality block, wherein an adjustable light source and a photoelectric detector are fixed on the fixing frame. The resonance light tunneling effect is utilized to detect large change amount of transmission intensity (i)T( / i) caused by tiny shift amount change of the quality block, so displacement amount can be acquired through monitoring the light transmission intensity change, and thereby accurate measurement on the micro displacement amount can be realized.

Description

technical field

[0001] The invention relates to an acceleration detector, in particular to an acceleration detector and a detection method based on the principle of resonant light tunneling effect. Background technique

[0002] At present, accelerometers are used in many fields, such as measuring the collision strength of cars in traffic accidents, detecting the acceleration performance of aircraft, and the vibration intensity of bridges under the influence of external environments. Under the condition of rapid development of micro-electro-mechanical systems (MEMS) technology, micro-mechanical accelerometers, known for their low power consumption, easy integration, small size, and small weight, stand out and become the core device of the micro-inertial measurement combination. Commonly used MEMS accelerometers include capacitive and piezoresistive accelerometers, and capacitive accelerometers mainly include cantilever beams and mass blocks. For capacitive accelerometers, du...

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