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optical equipment

A technology of optical equipment and imaging optics, applied in the direction of optics, optical components, instruments, etc., can solve the problems of rising rotational torque, decrease and increase of operability of optical equipment, etc.

Active Publication Date: 2020-09-15
MITUTOYO CORP
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Due to the weight of the stage or measuring head, there may be a difference between the rotational torque required for raising and the rotational torque required for lowering
An increase in the difference between the turning torques required for upward and downward movement leads to a decrease in the operability of the optical device

Method used

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  • optical equipment
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Experimental program
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Effect test

Embodiment Construction

[0031] Embodiments of the present invention will be described below with reference to the drawings.

[0032] figure 1( Figure 1A and 1B ) are diagrams each schematically showing the appearance of a projection device as an optical device according to an embodiment of the present invention. Figure 1A is the front view (in the Y direction) of the projection device 100, and Figure 1B is a side view (in the X direction) of the projection apparatus 100 .

[0033] The projection device 100 includes a base unit 10 , an observation unit 20 , a stage (placement unit) 40 , and an illumination unit 45 . The base portion 10 is a portion placed on a desk or the like and has a substantially rectangular parallelepiped shape in this embodiment.

[0034] On the front side ( Figure 1B the left side in) to the back side ( Figure 1B 3 / 4 of the area on the right side of ) is provided with a stage 40 on which a workpiece (object) W is placed. The stage 40 is connected to an x-axis movement...

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PUM

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Abstract

An optical apparatus including: a stage on which an object is mounted; an observation section including an imaging system forming an image of the object; a shaft rotatable in a first direction and a second direction opposite to the first direction; a drive that moves the observation section or the stage in a third direction defying a gravity according to rotation of the shaft in the first direction and in a fourth direction opposite to the third direction according to rotation of the shaft in the second direction; and a torque controller including a clutch that permits rotation of the shaft in the first direction, inhibits rotation of the shaft in the second direction, and rotates in the second direction with the shaft as a rotation force in the second direction is input to the shaft, and a restriction section restricting rotation of the clutch.

Description

technical field [0001] The present invention relates to an optical device for observing and measuring based on workpiece images. Background technique [0002] Conventionally, there has been known an optical device that forms an image of a workpiece by an optical system each having an objective lens and an imaging lens, and performs observation and measurement based on the workpiece image. For example, in a measurement projection device, an image of a workpiece is projected by a projection unit, and the projected workpiece is visually measured. Furthermore, in the image measuring apparatus, an image of a workpiece is projected with a digital camera or the like, and measurement or the like is performed based on the digital image. In the optical device as described above, it is important to focus the workpiece image with high precision. [0003] For example, focusing is performed by relatively moving a stage on which a workpiece is placed and a measuring head on which an imag...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G02B27/02
CPCG02B27/022G02B27/028G02B21/0016G02B21/26
Inventor 藤井宣良
Owner MITUTOYO CORP