Glass sputtering unit

A sputtering and glass technology, applied in the field of glass coating equipment, can solve the problems of affecting the coating quality, improper setting of sputtering equipment and pumping equipment, incomplete vacuum and other problems

Inactive Publication Date: 2016-09-07
WUHU VACUUM TECH
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0004] The purpose of the present invention is to provide a glass sputtering unit, which solves the problem that the sputtering equipment and pumping equipmen

Method used

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  • Glass sputtering unit

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Embodiment Construction

[0022] Specific embodiments of the present invention will be described in detail below in conjunction with the accompanying drawings. It should be understood that the specific embodiments described here are only used to illustrate and explain the present invention, and are not intended to limit the present invention.

[0023] Such as figure 1 As shown, the present invention provides a glass sputtering unit, wherein the glass sputtering unit includes a transport bin, and a transport mechanism 6 is arranged in the transport bin, and the upper surface of the transport bin is along the The first pumping unit 1, the sputtering unit 3 and the second pumping unit 2 are arranged in sequence in the conveying direction, the coated glass 5 is placed on the conveying mechanism 6, and the first pumping unit 1 passes through the first valve The mechanism 41 communicates with the sputtering unit 3, the second pumping unit 2 communicates with the sputtering unit 3 through the second valve me...

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Abstract

The invention discloses a glass sputtering unit. The glass sputtering unit comprises a transportation cabin; a transportation mechanism is arranged inside the transportation cabin; a first pumping unit, a sputtering unit and a second pumping unit are sequentially arranged on the upper surface of the transportation cabin and along the conveying direction of the transportation mechanism; coated glass is arranged on the transportation mechanism; the first pumping unit communicates with the sputtering unit through a first valve mechanism; the second pumping unit communicates with the sputtering unit through a second valve mechanism and also communicates with the transportation cabin through a third valve mechanism. The glass sputtering unit disclosed by the invention is capable of solving the problem that subsequent coating quality is affected by incomplete vacuum caused by improper setting of sputtering equipment and pumping equipment in a common sputtering unit during glass coating.

Description

technical field [0001] The present invention relates to glass coating equipment, in particular, to a glass sputtering unit. Background technique [0002] In the glass coating process, vacuum coating is a common method, which mainly isolates the atoms of the material from the heating source in a vacuum chamber and strikes them on the surface of the glass. The vacuum coating of glass is carried out in the sputtering unit. According to the technical requirements of the coating, the vacuum environment must be ensured during the coating. If the sputtering equipment and pumping equipment are not set properly, the vacuum will be incomplete during the glass coating, which will affect the subsequent coating. quality. [0003] Therefore, it is an urgent problem to be solved in the present invention to provide a glass sputtering unit with reasonable setting of sputtering equipment and pumping equipment to ensure that the glass is completely in a vacuum environment during coating, so a...

Claims

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Application Information

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IPC IPC(8): C23C14/34C23C14/56
CPCC23C14/34C23C14/564
Inventor 金海涛薛辉昌江任俊春
Owner WUHU VACUUM TECH
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