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Adjustable deformable mirrors to compensate for beam irregularities

A mirror, purpose technology, applied in the field of compensating aberrations, to achieve the effects of low operation, compensating aberrations, and low manufacturing costs

Inactive Publication Date: 2019-01-22
JENOPTIK OPTICAL SYST
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

The known prior art does not satisfactorily eliminate the stated disadvantages

Method used

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  • Adjustable deformable mirrors to compensate for beam irregularities
  • Adjustable deformable mirrors to compensate for beam irregularities
  • Adjustable deformable mirrors to compensate for beam irregularities

Examples

Experimental program
Comparison scheme
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Embodiment Construction

[0080] In a first exemplary embodiment of the mirror 1 according to the invention, figure 1 A mirror element (in the form of a planar element 2 ) and an actuation element 4 are shown as basic elements.

[0081] The planar element 2 has a first side 2.1 and a second side 2.2, which run parallel to each other. The first side 2.1 faces away from the main body 3, while the second side 2.2 faces the main body 3. The planar element 2 has a rectangular shape with four end faces 2.3 (two of which are shown). The planar element 2 is fixed to and held by the body 3 . The main body 3 is configured as a flexible hinge in direct contact with the second side 2 . 2 , while thus the actuating element 4 is formed by the main body 3 . The flexible hinge is formed by a kinematic configuration with multiple cooperating (flexible) hinges.

[0082] for the sake of figure 2 The actuation element 4 is illustrated in a cross-sectional view of a first embodiment of the present invention, indicati...

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Abstract

The invention relates to an adjustable deformable mirror (1) for compensating irregularities of a beam, the mirror having a mirror element for reflecting incident rays of the beam, for fixing the mirror element and at least one actuating element (4) for applying a force (F) to the mirror element, wherein the mirror element is a planar element (2) with a thickness (d) of at least 1 mm and the actuating element (4) is a lever mechanism with a plurality of lever elements (5). The invention also relates to a method for compensating for irregularities in a beam of light (12.1, 12.2) and to an optical arrangement with a mirror (1) according to the invention.

Description

technical field [0001] The invention relates to an adjustable deformable mirror for compensating beam aberrations, to the use of the mirror and to a method of using the mirror for compensating the aberrations. Background technique [0002] In the following, the term aberration should be understood broadly to mean various imaging errors. One such imaging error is, for example, astigmatism. Imaging errors (aberrations) can be captured as wavefront errors, which in turn can be described mathematically. So-called Zernike polynomials are often used to mathematically represent wavefront errors. [0003] Even Zernike polynomials are defined as: [0004] [0005] And odd Zernike polynomials are defined as: [0006] [0007] where m and n are non-negative integers, where n≥m. φ is the azimuth angle and ρ is the normalized radial distance. [0008] These radial polynomials is defined as [0009] if n-m is even and If n-m is odd. [0010] They are often lumped toget...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G02B26/08G02B27/00
CPCG02B26/0825G02B27/0068G02B7/1821
Inventor 托尔斯滕·艾尔博简·威尔斯施尼克
Owner JENOPTIK OPTICAL SYST