Developer concentration distributing method in image development process
A developing process and developing solution technology, which is applied in various fluid ratio control, photosensitive material processing, etc., and can solve the problem that the graphics CD deviates from the set range value developing solution, etc.
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specific Embodiment approach 1
[0042] Specific implementation mode 1: A method for adjusting the developer concentration in the image development process of this embodiment is specifically prepared according to the following steps:
[0043] when in the developer When the concentration exceeds the threshold, adjust the concentration Y of the developer according to the correction relationship;
[0044] According to the concentration Y of the developer and the compensation value of the Offset function, the target concentration M of the developer is calculated; the developer concentration meter in the developer control system (DCS) is measuring the developer There is a certain machine error in the concentration, and the concentration measuring meter will be calibrated in the early stage of equipment debugging, and the offset function will be compensated to eliminate the machine error. The change of the concentration realizes the compensation value of the Offset function, and according to the obtained target...
specific Embodiment approach 2
[0056] Specific embodiment 2: The difference between this embodiment and specific embodiment 1 is that the concentration Y of the developer formulated according to the correction relationship is specifically:
[0057] By measuring developer concentration and measuring post-developer Concentration, according to the critical dimension CD of the pattern after development can be maintained at the set value, the concentration of the developer and the concentration of the developer are obtained. Concentration has an approximate relationship as:
[0058] Y=2.38+2×10 -4 X+8×10 -8 x 2
[0059] Among them, Y is the developer solution concentration wt%, X is the developer solution Concentration ppm;
[0060] 2.38% developer normally used in the process When the concentration is 1500ppm ~ 2000ppm (ie 0.15% ~ 0.20%) after development, the critical dimension CD of the graphics meets the set range value, so the corrected relationship is:
[0061] Y=2.38+2×10 -4 (X-2000)+8×10 -8...
specific Embodiment approach 3
[0065] Specific embodiment three: the difference between this embodiment and specific embodiment one or two is that: the complementary value of the function is the complementary value K of the Offset function; the calculation method of the complementary value K of the Offset function is:
[0066] M=N+K-(Y-2.38)
[0067] Among them, N is the theoretical developer concentration; M is the developer target concentration; -(Y-2.38) value is The concentration change is updated; the Offset function is a supplementary operation function in excel. Other steps and parameters are the same as those in Embodiment 1 or Embodiment 2.
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