The invention relates to an
etching liquid replenishing device, an
etching liquid replenishing method and wet
etching equipment with the etching liquid replenishing device. The etching liquid replenishing device disclosed by the invention comprises a liquid inlet
pipe, a liquid outlet
pipe, a
liquid storage tank, a liquid replenishing unit, a concentration detection unit and a
processing unit, wherein the liquid inlet
pipe and the liquid outlet pipe are communicated with an etching tank; the
liquid storage tank is communicated with the etching tank through the liquid inlet pipe and the liquid outlet pipe; the liquid replenishing unit is used for replenishing spare solutions of various components of the etching liquid to the
liquid storage tank; the concentration detection unit is used for detecting concentrations of various components of at least one of the
liquid storage tank, the etching tank, the liquid inlet pipe and the liquid outlet pipe; the
processing unit is used for calculating volumes of the spare solutions of various components needing to be replenished into the
liquid storage tank according to a concentration detection result,
target concentration ranges of various components in the etching liquid, volume of the etching liquid in the
liquid storage tank and concentrations of the spare solutions of various components; and the liquid replenishing unit is used for replenishing the spare solutions of various components to the liquid
storage tank according to a calculation result, so that the concentrations of various components are adjusted to be in the
target concentration ranges. According to the invention, stability of the concentrations of various components of the etching liquid can be effectively ensured.