Focused shock excitation device capable of exciting MEMS microstructure in water

Abstract

The invention discloses a focused shock excitation device capable of exciting an MEMS microstructure in water. The focused shock excitation device comprises a support and an ellipsoidal cavity which are arranged on a substrate, wherein the ellipsoidal cavity is formed by connecting an upper cavity and a lower cavity and an inner cavity of the ellipsoidal cavity forms more than half ellipsoid; a mounting seat is arranged in the lower cavity; two pin electrodes are arranged on the upper end of the mounting seat; the two pin electrodes are arranged on a cross section at a first focal point of the ellipsoid; a microstructure unit is arranged on the support through a manual tri-axial displacement table; the microstructure unit is arranged at a second focal point; the pin electrodes are respectively electrically connected to two electrodes of a high-voltage capacitor; a distance between pinpoints of the pin electrodes is smaller than a maximum air breakdown gap in water after the high-voltage capacitor is fully charged; and two electrodes of the high-voltage capacitor are respectively electrically connected to an anode and a cathode of a high-voltage power supply. The device not only excites the MEMS microstructure in water but also avoids the interference of vibration response of a base structure on a test result, the non-contact excitation of the microstructure is realized and the excitation effect is good.

Description

technical field [0001] The invention belongs to the technical field of micromechanical electronic systems, in particular to a focused shock wave excitation device capable of exciting MEMS microstructures in water. Background technique [0002] Due to the advantages of low cost, small size and light weight, MEMS micro devices have broad application prospects in many fields such as automobile, aerospace, information communication, biochemistry, medical treatment, automatic control and national defense. For many MEMS devices, the micro-displacement and micro-deformation of their internal microstructures are the basis for the realization of device functions. Therefore, accurate testing of dynamic characteristic parameters such as the amplitude, natural frequency, and damping ratio of these microstructures has become the key to developing MEMS products. important content. In addition, the dynamic characteristic test of MEMS microstructure needs to take into account the working e...

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Problems solved by technology

However, the working principle of this device is to use the shock wave generated by the needle electrode and the plate electrode to discharge in the air to excite the microstructure, so it cannot be used to excite the microstructure in water. In addition, the device uses a base excitation Therefore, when using the non-contact optical vibration measurement method to test the dynamic characteristics of the microstructure, the vibration response signal obtained will inevitably include the vibration response of the base structure, which will make the acquisition The dynamic characteristic parameters of the microstructure become very difficult

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