A non-contact excitation device for mems microstructure based on shock wave

Abstract

The invention discloses a MEMS microstructure non-contact excitation device based on shock waves, which includes a substrate, a manual three-axis displacement platform and a support, and a microstructure unit is arranged on the manual three-axis displacement platform; The inner cavity is an ellipsoid cavity of half an ellipsoid surface, and a first needle electrode unit is arranged on one side of the ellipsoid cavity, and the tip of the first needle electrode points to the first focal point; the microstructure unit is located on the second side of the ellipsoid surface. At the focal point; on the other side of the ellipsoid cavity, a second needle electrode unit is provided, and the needle tip of the second needle electrode points to the first focus of the ellipsoid; the first and second needle electrodes are respectively electrically connected to the two poles of the high-voltage capacitor, A first air switch is provided between the high-voltage capacitor and the first needle electrode; the two poles of the high-voltage capacitor are respectively electrically connected to the positive and negative poles of the high-voltage power supply, and the on-off is controlled by the second air switch. The device can avoid the interference of the vibration response of the base structure on the test results, realizes the non-contact excitation of the MEMS microstructure, and has a good excitation effect.

Description

technical field [0001] The invention belongs to the technical field of micromechanical electronic systems, and in particular relates to a shock wave-based MEMS microstructure non-contact excitation device. Background technique [0002] Due to the advantages of low cost, small size and light weight, MEMS microdevices have broad application prospects in many fields such as automobile, aerospace, information communication, biochemistry, medical treatment, automatic control and national defense. For many MEMS devices, the micro-displacement and micro-deformation of their internal microstructures are the basis for the realization of device functions. Therefore, accurate testing of dynamic characteristic parameters such as the amplitude, natural frequency, and damping ratio of these microstructures has become the key to developing MEMS products. important content. [0003] In order to test the dynamic characteristic parameters of the microstructure, it is first necessary to make ...

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Problems solved by technology

However, the main disadvantage of this device is that the device uses an elastic base to excite the microstructure, so when the non-contact optical vibration measurement method is used to test the dynamic characteristics of the microstructure, the vibration response obtained The signal will inevitably contain the vibration response of the base structure, which will make it very difficult to obtain the dynamic characteristic parameters of the microstructure

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