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37results about How to "Improve vibration performance" patented technology

System for testing rotation and vibration performance of inertia device

The invention discloses system for testing the rotation and vibration performance of an inertia device, which consists of a rotation driving system, a vibration test system, a rotation and vibration tool and a data testing system. In the rotation driving system, a motor drives the inertia device to be tested to rotate through a flexible shaft; in the vibration test system, a vibration table drives the inertia device to be tested to vibrate through a gapless bearing; and in the data test system, the output data of the inertia device to be tested are tested by a conducting slip ring. In the system for testing the rotation and vibration performance of the inertia device, the motor operates in a non-vibration environment, the bearing has excellent vibration performance, and the data test system is free from data wire torsion. The system testing the rotation and vibration performance of the inertia device can be used to test the performance of various inertia devices when the inertia devices rotate on any shaft and vibrate along a direction parallel or perpendicular to the shaft, and has a rotation speed of 0 to 10,000 degrees per second, a rotation angle free from limitation, a random vibration of 1 g<2> / Hz within a range from 10 to 2,000 HZ, and the sine sweep vibration of 30 g within a range from 10 to 2,000. At present, no other system can achieve the same goal.
Owner:ZHEJIANG UNIV

Linear vibration generating device

Disclosed is a linear vibration generating device including: a stator including a bracket on which a coil is seated, and a case made of a magnetic material which is engaged to the bracket to form an inner space; a vibrator including a permanent magnet for generating a vibration force in cooperation with the coil, and a weight enclosing a circumference of the permanent magnet; a resilient member which is positioned between the vibrator and the stator to resiliently support vertical oscillation of the vibrator; and a plate which is positioned between the resilient member and the vibrator.
Owner:JAHWA ELECTRONICS

Turbine compressor test system

The invention discloses a turbine compressor test system. The turbine compressor test system is characterized in that rotation output of a motor is driven to a turbine compressor main shaft of a turbine compressor through a transmission case and a torque sensor so as to form a test main engine, an air inlet disturbance unit, an exhaust disturbance unit, an airflow actuating device and a measure and control unit are respectively arranged aiming at the test main engine. The turbine compressor test system provided by the invention can test properties of the turbine compressor under various working conditions such as different air inlet condition saltations, air inlet distortion and exhaust conditional mutation, simulate the excitation of airflow to blades under different work conditions through an experimental method, and measure the parameters including stress and vibration frequency of the blades under situations with different excitation of airflow.
Owner:HEFEI GENERAL MACHINERY RES INST

Brain-computer interface method and system based on real-time closed loop vibration stimulation enhancement

The present invention discloses a brain-computer interface method and system based on real-time closed loop vibration stimulation enhancement. The method includes: displaying and providing a motor imagery task to a subject, and collecting a generated digital electroencephalogram signal; reading the digital electroencephalogram signal, judging whether a preset time period is exceeded or not, performing interception if YES, and performing continuous reading if NO; performing band-pass filtering, obtaining time-frequency characteristics of the digital electroencephalogram signal through calculation by fast Fourier transform, and extracting a frequency value with highest frequency energy as a main frequency; obtaining an instantaneous phase of the digital electroencephalogram signal through calculation by Hilbert transform; generating predicted sine waves by respectively using the main frequency and the instantaneous phase as a frequency and an initial phase of sine waves, and predicting and obtaining real-time phase information; and judging whether the real-time phase is in a vibration stimulation application phase interval or not, generating and outputting a control instruction, and controlling a vibration motor to vibrate and to stimulate a sensory channel of the subject according to the control instruction. The present invention improves a signal-to-noise ratio of a brain-computer interface system, and enhances a recognition rate of a motor imagery signal.
Owner:SOUTHEAST UNIV

System and method for synchronously controlling fatigue loading of wind turbine blades based on multiple exciters

The invention discloses a system for synchronously controlling fatigue loading of wind turbine blades based on multiple exciters. Based on an electric driving inertial excitation device, the multipleexciters can improve the load precision and excitation capacity of fatigue tests. In order to eliminate the coupling effect in the loading process of the wind power blades based on the exciters, basedon a virtual master control adjacent and cross coupling structure, an exciter synchronous PID control algorithm is designed, and the vibration amplitude of the blades is controlled through self adaptation. A motion controller is adopted for realizing a complex control rule and synchronous control over fatigue loading and improving the self-adaptivity and robustness of the control system. Based onmodel-free control, the control algorithm is used in a wind power blade test site through a model machine and can make the exciters rapidly follow to maintain a good synchronous state for loading, fluctuations of a phase difference between the exciters are quite small, the vibration amplitude of the blades is stable, stable and effective loading is realized for the wind power blades, a good effect is realized, and high popularization values are obtained.
Owner:NANCHANG INST OF TECH

High-speed rotating valve and flow parameter real-time detecting device for visualization observation

A high-speed rotating valve and flow parameter real-time detecting device for visualization observation comprises a prototype-plane observation valve, a high-speed visualization observing and analyzing device and a flow parameter real-time measuring and signal collecting device. The high-speed visualization observing and analyzing device comprises a high-speed video machine and a processor, a camera of the high-speed video machine is aligned with an observation window, the signal output end of the high-speed video machine is connected with the signal input end of the processor, and the signal output end of the processor is connected with the data input end of the flow parameter real-time measuring and signal collecting device. The flow parameter real-time measuring and signal collecting device comprises a signal collecting device and a flow measuring device, wherein the signal input end of the signal collecting device is connected with the corresponding signal output end of the processor, and the signal output end of the signal collecting device is connected with the signal input end of the flow measuring device. The high-speed rotating valve and flow parameter real-time detecting device for visualization observation has the advantages that high-speed / amplification shooting is carried out on the inner air hole flow phenomenon in the rotating valve in a microspur range, and meanwhile flow, vibration, noise and other parameter information data are collected in real time.
Owner:ZHEJIANG UNIV OF TECH

Suspension control arm assembly for vehicles

InactiveUS20070045980A1Eliminates undesired complianceIncreases lateralRigid suspensionsInterconnection systemsControl armBeam axle
A control arm assembly for a suspension system of a vehicle includes a control arm having a triangular shape for connection to vehicle structure and a beam axle of the vehicle. The control arm assembly also includes a plurality of bushings connected to the control arm and for connection to the vehicle structure and the beam axle of the vehicle.
Owner:GM GLOBAL TECH OPERATIONS LLC

Self-protection control method of aero-engine in unwarmed state

The invention belongs to the field of aircraft engine design, and relates to a self-protection control method of an aero-engine in an unwarmed state. The method comprises the following steps that an engine starting mode and an engine state are acquired; if the engine starting mode is cold-state starting and the engine state is a slow running state or a state below the slow running state, a controlinstruction of a throttle lever PLA is received to start the engine; and if the engine starting mode is cold-state starting and the engine state is a state above the slow running state, a control instruction of a built-in throttle lever PLA is received to start the engine, wherein the control instruction of the built-in throttle lever PLA changes along with the trend of the control instruction ofthe throttle lever PLA, and the change rate is controlled within a set value. After the entering condition of warm-up starting is met, the built-in throttle lever PLA is used for replacing a mechanical throttle PLA to control the engine, and the problem of engine surge caused by quick push-up of a throttle is effectively avoided.
Owner:AECC SHENYANG ENGINE RES INST

Real time compensation method of rectification error in fiber gyro

The invention discloses a real time compensation method of the rectification error in a fiber gyro. The method comprises the following steps: carrying out periodic square wave phase modulation and closed loop control on an optical system, carrying out analog-to-digital conversion sampling on the output signal of the optical system to obtain digital sampling values of the output signal, and synchronously demodulating to obtain a digital quantity corresponding to an angular speed; and measuring the light intensity and the residual phase in the fiber gyro in real time, carrying out spectrum analysis on the obtained light intensity and the residual phase to obtain the amplitude spectrum parameter and the phase spectrum parameter of the light intensity and the residual phase, calculating the current rectification error of the fiber gyro by using the amplitude spectrum and the phase spectrum of the light intensity and the residual phase, subtracting the obtained rectification error from the angular speed obtained through the synchronous demodulation of the fiber gyro to obtain a compensated angular speed, outputting the angular speed, and carrying out real time compensation on the rectification error. The method can compensate the rectification error of the fiber gyro in real time, and improves the vibration performance of the fiber gyro.
Owner:ZHEJIANG UNIV

Mud removing feeding machine

InactiveCN110833927AEliminate only up and down vibrations,Eliminates defects without horizontal conveying movementSievingScreeningMining engineeringMechanical engineering
The invention provides a mud removing feeding machine, and belongs to the technical field of mining machines. The mud removing feeding machine comprises a vibration box, and an excitation device for driving the vibration box to vibrate. The upper end face of the vibration box is a feeding conveying face, and the feeding conveying face comprises multiple conveying faces, and the multiple conveyingfaces are in continuous butt joint along the mineral aggregate advancing path and are arranged sequentially from high to low in a ladder shape. Each conveying face is composed of multiple screen bars,and has screening clearances, and the length direction of the screen bars is consistent with the advancing direction of mineral aggregate. The widths of the screen bars are gradually reduced in the mineral aggregate advancing direction, and the screening clearances formed by the screen bars of the same conveying face are gradually enlarged in the mineral aggregate advancing direction. According to the mud removing feeding machine, the feeding conveying face is arranged in the ladder shape, the screen bars of special structures are adopted, blocking happening in the feeding process can be reduced, and a very good mud removing and screening effect is achieved.
Owner:义乌市金牛环保科技有限公司

High-speed rotary valve and flow parameter real-time detection device for visual observation

A high-speed rotating valve and flow parameter real-time detecting device for visualization observation comprises a prototype-plane observation valve, a high-speed visualization observing and analyzing device and a flow parameter real-time measuring and signal collecting device. The high-speed visualization observing and analyzing device comprises a high-speed video machine and a processor, a camera of the high-speed video machine is aligned with an observation window, the signal output end of the high-speed video machine is connected with the signal input end of the processor, and the signal output end of the processor is connected with the data input end of the flow parameter real-time measuring and signal collecting device. The flow parameter real-time measuring and signal collecting device comprises a signal collecting device and a flow measuring device, wherein the signal input end of the signal collecting device is connected with the corresponding signal output end of the processor, and the signal output end of the signal collecting device is connected with the signal input end of the flow measuring device. The high-speed rotating valve and flow parameter real-time detecting device for visualization observation has the advantages that high-speed / amplification shooting is carried out on the inner air hole flow phenomenon in the rotating valve in a microspur range, and meanwhile flow, vibration, noise and other parameter information data are collected in real time.
Owner:ZHEJIANG UNIV OF TECH

Vibrating type power head device

The invention discloses a vibrating type power head device which includes a vibration assembly and an external box which is arranged outside of the vibration assembly; a guiding mechanism is arrangedbetween the vibration assembly and the external box; the vibration assembly includes a vibration box and a gear box, the front end of the gear box is connected to a drill tool by the output joint, andthe rear end is detachably connected to the vibration box. The vibration box directly drives the gear box and the spindle to vibrate together; the vibration box and the gear box are fixedly connected, ; thus driving the drill tool to vibrate and rotary drilling simultaneously; the damage of the main axle can effectively reduced when the vibration is vibrated, so that the transmission line of thevibration is more reasonable. Moreover, the vibration box and the gear box can ensure that the vibration assembly only take the axial vibration displacement in the axial direction, but restrict the unreasonable vibration in other directions by the guiding mechanism, so that the generate and transmit of the excitation force is stable and reliable, the impact direction is consistent, and the workingefficiency of drilling is improved.
Owner:无锡市安曼工程机械有限公司

Focused shock excitation device capable of exciting MEMS microstructure in water

The invention discloses a focused shock excitation device capable of exciting an MEMS microstructure in water. The focused shock excitation device comprises a support and an ellipsoidal cavity which are arranged on a substrate, wherein the ellipsoidal cavity is formed by connecting an upper cavity and a lower cavity and an inner cavity of the ellipsoidal cavity forms more than half ellipsoid; a mounting seat is arranged in the lower cavity; two pin electrodes are arranged on the upper end of the mounting seat; the two pin electrodes are arranged on a cross section at a first focal point of the ellipsoid; a microstructure unit is arranged on the support through a manual tri-axial displacement table; the microstructure unit is arranged at a second focal point; the pin electrodes are respectively electrically connected to two electrodes of a high-voltage capacitor; a distance between pinpoints of the pin electrodes is smaller than a maximum air breakdown gap in water after the high-voltage capacitor is fully charged; and two electrodes of the high-voltage capacitor are respectively electrically connected to an anode and a cathode of a high-voltage power supply. The device not only excites the MEMS microstructure in water but also avoids the interference of vibration response of a base structure on a test result, the non-contact excitation of the microstructure is realized and the excitation effect is good.
Owner:BOHAI UNIV

Rotary ultrasonic vibration excitation device and time-space phase tuning method

The invention discloses a rotary ultrasonic vibration excitation device and a time-space phase tuning method. The device comprises a disc stator, piezoelectric vibrators and an adjustment mechanism. The piezoelectric vibrators are installed along the axial direction of the disc stator. The disc stator and the piezoelectric vibrators are distributed along the circumference in group symmetry or uniformly. Under the action of external voltage, the piezoelectric vibrators produce axial vibration and excite periodic vibration of the disc stator. Under excitation of the multiple piezoelectric vibrators, the disc stator can produce traveling wave or standing wave. The time-space phase tuning method comprises analyzing the vibration excitation rules of the two basic configurations of the piezoelectric vibrators, namely grouped distribution and uniform distribution, and giving specific vibration excitation performance optimization technologies. The vibration excitation device has the significant advantages of high mechanical and electrical conversion efficiency, multi-time-space phase vibration excitation, dynamically adjustable amplitude, and the like. The technical problem that the existing vibration excitation device of the kind is low in efficiency and the time-space phase selection range is limited is solved.
Owner:TIANJIN UNIV

Focusing shock wave excitation device for performing non-contact excitation on MEMS (micro electro mechanical system) micro structure

InactiveCN106315507AEnable contactless incentivesDynamic characteristic parameters are easyMicrostructural devicesCapacitanceMicro structure
The invention discloses a focusing shock wave excitation device for performing non-contact excitation on an MEMS (micro electro mechanical system) micro structure. The focusing shock wave excitation device comprises a base plate, wherein a manual three-axis displacement table and a support seat are arranged on the base plate; a micro structure unit is arranged on a Z-axis slide plate of the manual three-axis displacement table; an ellipsoid cavity with an inner cavity being half of an ellipsoid surface is arranged at the upper end of the support seat; the first focus point of the ellipsoid surface is positioned in the ellipsoid cavity; the micro structure unit is positioned at one side of a second focus point of the ellipsoid surface; a pin electrode unit is arranged on the ellipsoid cavity; two pin electrodes are electrically connected with two electrodes of a high-voltage capacitor; a first air switch is arranged between the high-voltage capacitor and one pin electrode; the distance between the pin points of the second pin electrodes is smaller than the maximum air breakdown gap after the high-voltage capacitor is sufficiently charged; the high-voltage capacitor is electrically connected to positive and negative electrodes of a high-voltage power supply. The focusing shock wave excitation device has the beneficial effects that the interference of the vibration response of the base structure on the test result can be avoided; the non-contact excitation on the MEMS micro structure is realized; the excitation effect is good; the dynamic feature parameters of the micro structure are convenient to obtain.
Owner:BOHAI UNIV

Focused shock wave excitation device for dynamic feature testing of microstructure of MEMS (micro-electromechanical system)

InactiveCN106370372ADynamic characteristic parameters are easyEnable contactless incentivesVibration testingAxial displacementCapacitance
The present invention discloses a focused shock wave excitation device for the dynamic feature testing of the microstructure of an MEMS (micro-electromechanical system). The device includes a substrate, a manual tri-axial displacement table and a supporting seat; the Z-axis slide plate of the manual tri-axial displacement table is provided with a microstructure unit; the upper end of the supporting seat is provided with an ellipsoidal cavity of which the inner cavity is half of an ellipsoidal surface; the first focus of the ellipsoidal surface is located in the ellipsoidal cavity; two sides of the ellipsoidal cavity are symmetrically provided with two pin electrode units; the tips of the two pin electrode units are located at the cross section of the first focus and point to the first focus; the microstructure of the MEMS is located at the second focus of the ellipsoidal surface; the two pin electrodes are electrically connected with the two poles of a high-voltage capacitor; a first air switch is arranged between one pin electrode and the high-voltage capacitor; the two poles of the high-voltage capacitor are electrically connected with a high-voltage power source; and the connection and disconnection of the high-voltage capacitor and the high-voltage power source are controlled by a second air switch. With the focused shock wave excitation device adopted, interference on a testing result caused by the vibration response of a base structure can be avoided, the non-contact excitation of the microstructure of the MEMS can be realized, an excitation effect is good, and the testing of the dynamic feature parameters of the microstructure can be facilitated.
Owner:BOHAI UNIV

Vibration reduction module, fan external hanging type vibration reduction module and fan

The invention provides a vibration reduction module. The vibration reduction module comprises a length-changeable damping frame and a weight-changeable balancing weight located in the vibration reduction frame, the balancing weight is provided with two oppositely-arranged end faces, the two end faces of the balancing weight elastically abut against the inner walls of the two sides of the vibrationreduction frame respectively, elastic extrusion force is formed on the end faces of the balancing weight and the inner wall of the vibration reduction frame respectively, and the elastic extrusion force changes along with the elastic coefficient; at least one pair of fixing elements is arranged on the outer wall of the vibration reduction frame, the arrangement direction of the fixing elements isperpendicular to the axis of the balancing weight, each fixing element corresponds to one locking element, and the vibration reduction frame is detachably connected with the vibration equipment through the fixing elements and the locking elements in sequence. The vibration reduction frame is modularized, the vibration reduction frame and the fan are combined into a complete fan system, and when the fan rotates to generate vibration, due to the fact that the vibration is transmitted to the vibration reduction frame, the balance weight mass on the inner side is driven to vibrate along with thevibration; and under the condition that the two vibration frequencies are inconsistent, the energy is naturally consumed, and the energy transmission is reduced.
Owner:SUZHOU LANGCHAO INTELLIGENT TECH CO LTD

System for testing rotation and vibration performance of inertia device

The invention discloses system for testing the rotation and vibration performance of an inertia device, which consists of a rotation driving system, a vibration test system, a rotation and vibration tool and a data testing system. In the rotation driving system, a motor drives the inertia device to be tested to rotate through a flexible shaft; in the vibration test system, a vibration table drives the inertia device to be tested to vibrate through a gapless bearing; and in the data test system, the output data of the inertia device to be tested are tested by a conducting slip ring. In the system for testing the rotation and vibration performance of the inertia device, the motor operates in a non-vibration environment, the bearing has excellent vibration performance, and the data test system is free from data wire torsion. The system testing the rotation and vibration performance of the inertia device can be used to test the performance of various inertia devices when the inertia devices rotate on any shaft and vibrate along a direction parallel or perpendicular to the shaft, and has a rotation speed of 0 to 10,000 degrees per second, a rotation angle free from limitation, a random vibration of 1 g<2> / Hz within a range from 10 to 2,000 HZ, and the sine sweep vibration of 30 g within a range from 10 to 2,000. At present, no other system can achieve the same goal.
Owner:ZHEJIANG UNIV

Buffer for subway rail

The invention relates to a buffer for a subway rail. The buffer comprises equipment for buffering and reducing vibration and a stabilizing device and the like. The equipment for buffering and reducingvibration includes a positioning plate fixedly connected into a base, a moving opening is formed in the positioning plate, a buckling block is movably connected into the moving opening, a buckling strip is fixedly connected to the upper end of the buckling block, and an assembling block is fixedly connected to the upper end of the buckling strip. The stabilizing device comprises positioning blocks fixedly connected to the two sides of the upper end of the assembling block, adjusting openings are formed in the positioning blocks, screws used for adjusting are connected into the adjusting openings in a screwed mode, and one ends of the screws used for adjusting are fixedly connected with moving blocks. In combination with other structures, the defects that in the prior art, vertical and horizontal vibration caused by high-speed operation of subway wheels can damage the interior and exterior of a rail, the service life of the rail is reduced, rivets and rivet holes used for stabilizing wheels shake and thus the tracks shake, running of the wheels is not facilitated, the specifications of the tracks are still different, and targeted stabilizing equipment does not exist are overcome.
Owner:NANJING INST OF RAILWAY TECH

Stator core assembly, stator assembly, motor device and method thereof

The invention discloses a stator core assembly, a stator assembly, a motor device and a method thereof. The stator core assembly includes a plurality of core units, each core unit including a yoke portion and a tooth portion, the yoke portion extending in a first direction, the tooth portion being connected to the yoke portion and extending in a second direction, the tooth portion including a tooth tail disposed away from the yoke portion, each core unit engaging an adjacent core unit such that the plurality of core units are in a chain configuration. A stator assembly, an electric machine arrangement and a method thereof are also disclosed. According to one or more embodiments of the stator core assembly, the stator assembly, the motor device and the method thereof, the motor performance can be improved, the service life is prolonged, the application occasion is expanded, the process is simple, and cost benefits are achieved.
Owner:TECHTRONIC CORDLESS GP

MEMS (micro-electromechanical system) microstructure non-contact excitation device based on shock waves

InactiveCN106629585AEnable contactless incentivesAvoid interferenceMicrostructural devicesShock waveCapacitance
The invention discloses an MEMS (micro-electromechanical system) microstructure non-contact excitation device based on shock waves. The device comprises a substrate, a manual three-axis displacement table and a support, wherein a microstructure unit is arranged on the manual three-axis displacement table; an ellipsoidal cavity with an inner cavity in a half ellipsoidal shape is formed at the upper end of the support, a first pin electrode unit is arranged on one side of the ellipsoidal cavity, and the pinpoint of a first pin electrode points to the first focus; the microstructure unit is located at the second focus of the ellipsoidal surface; a second pin electrode unit is arranged on the other side of the ellipsoidal cavity, and the pinpoint of a second pin electrode points to the first focus of the ellipsoidal surface. The first pin electrode and the second pin electrode are electrically connected with two poles of a high-voltage capacitor respectively, and a first air switch is arranged between the high-voltage capacitor and the first pin electrode; the two poles of the high-voltage capacitor are electrically connected to the positive pole and the negative pole of a high-voltage power supply respectively and are controlled to be powered on or off through a second air switch. According to the device, interference of vibration response of a base structure to a test result can be avoided, non-contact type excitation of the MEMS microstructure is realized, and the excitation effect is good.
Owner:BOHAI UNIV

A non-contact excitation device for mems microstructure based on shock wave

InactiveCN106629585BEnable contactless incentivesAvoid interferenceMicrostructural devicesShock waveCapacitance
The invention discloses a MEMS microstructure non-contact excitation device based on shock waves, which includes a substrate, a manual three-axis displacement platform and a support, and a microstructure unit is arranged on the manual three-axis displacement platform; The inner cavity is an ellipsoid cavity of half an ellipsoid surface, and a first needle electrode unit is arranged on one side of the ellipsoid cavity, and the tip of the first needle electrode points to the first focal point; the microstructure unit is located on the second side of the ellipsoid surface. At the focal point; on the other side of the ellipsoid cavity, a second needle electrode unit is provided, and the needle tip of the second needle electrode points to the first focus of the ellipsoid; the first and second needle electrodes are respectively electrically connected to the two poles of the high-voltage capacitor, A first air switch is provided between the high-voltage capacitor and the first needle electrode; the two poles of the high-voltage capacitor are respectively electrically connected to the positive and negative poles of the high-voltage power supply, and the on-off is controlled by the second air switch. The device can avoid the interference of the vibration response of the base structure on the test results, realizes the non-contact excitation of the MEMS microstructure, and has a good excitation effect.
Owner:BOHAI UNIV

A Rotary Ultrasonic Vibration Device and Time-Temporal Phase Tuning Method

The invention discloses a rotary ultrasonic vibration excitation device and a time-space phase tuning method. The device comprises a disc stator, piezoelectric vibrators and an adjustment mechanism. The piezoelectric vibrators are installed along the axial direction of the disc stator. The disc stator and the piezoelectric vibrators are distributed along the circumference in group symmetry or uniformly. Under the action of external voltage, the piezoelectric vibrators produce axial vibration and excite periodic vibration of the disc stator. Under excitation of the multiple piezoelectric vibrators, the disc stator can produce traveling wave or standing wave. The time-space phase tuning method comprises analyzing the vibration excitation rules of the two basic configurations of the piezoelectric vibrators, namely grouped distribution and uniform distribution, and giving specific vibration excitation performance optimization technologies. The vibration excitation device has the significant advantages of high mechanical and electrical conversion efficiency, multi-time-space phase vibration excitation, dynamically adjustable amplitude, and the like. The technical problem that the existing vibration excitation device of the kind is low in efficiency and the time-space phase selection range is limited is solved.
Owner:TIANJIN UNIV

A focused shock wave excitation device that can excite mems microstructures in water

InactiveCN106430086BEnable contactless incentivesImprove vibration performanceMicrostructural devicesShock waveCapacitance
The invention discloses a focused shock wave excitation device capable of exciting MEMS microstructures in water, which comprises a support arranged on a substrate and an ellipsoid cavity, and the ellipsoid cavity is formed by connecting a lower cavity and an upper cavity. and the inner cavity forms more than half of an ellipsoid; there is a mounting seat in the lower cavity, and two needle electrodes are arranged on the upper end of the mounting seat; the needle points of the two needle electrodes are located on the cross section of the first focus of the ellipsoid; The microstructure unit is installed through a manual three-axis translation stage, and the microstructure unit is located at the second focal point of the ellipsoid; the needle electrodes are electrically connected to the two poles of the high-voltage capacitor, and the distance between the needle tips of the needle electrodes is less than the maximum value in water after the high-voltage capacitor is fully charged. The air breakdown gap; the two poles of the high-voltage capacitor are electrically connected to the positive and negative poles of the high-voltage power supply. The device can not only excite the MEMS microstructure in water, but also prevent the vibration response of the base structure from interfering with the test results, realize the non-contact excitation of the microstructure, and have good excitation effect.
Owner:BOHAI UNIV
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