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A focused shock wave excitation device that can excite mems microstructures in water

An excitation device and microstructure technology, applied in the direction of microstructure devices, microstructure technology, etc., can solve problems such as the inability to apply microstructure excitation and the difficulty of microstructure dynamic characteristic parameters, and achieve easy dynamic characteristic parameters, energy concentration, and improved excitation. The effect of vibration

Inactive Publication Date: 2017-09-15
BOHAI UNIV
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  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

However, the working principle of this device is to use the shock wave generated by the needle electrode and the plate electrode to discharge in the air to excite the microstructure, so it cannot be used to excite the microstructure in water. In addition, the device uses a base excitation Therefore, when using the non-contact optical vibration measurement method to test the dynamic characteristics of the microstructure, the vibration response signal obtained will inevitably include the vibration response of the base structure, which will make the acquisition The dynamic characteristic parameters of the microstructure become very difficult

Method used

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  • A focused shock wave excitation device that can excite mems microstructures in water
  • A focused shock wave excitation device that can excite mems microstructures in water
  • A focused shock wave excitation device that can excite mems microstructures in water

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Embodiment Construction

[0026] Such as Figure 1 to Figure 5 As shown, the present invention relates to a focused shock wave excitation device that can excite MEMS microstructures in water, including a substrate 1, on which a support 8 and an ellipsoid cavity 2 for containing water are fixed, The ellipsoid cavity 2 is formed by the lower cavity 201 and the upper cavity 202 being sealed and plugged together and connected by screws. The upper end of the upper cavity 202 is open so that the inner cavity of the ellipsoid cavity 2 forms a vertical More than half of the ellipsoid 203 arranged, the first focus of the ellipsoid 203 is located in the lower cavity 201, the second focus is located in the upper cavity 202; There is a second sealing ring 14 .

[0027] In the central hole at the bottom of the lower cavity, a support seat 18 is sealed and connected, the upper end of the support seat 18 is inserted into the lower cavity, and the upper end of the support seat 18 is connected with a connecting sleeve...

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Abstract

The invention discloses a focused shock wave excitation device capable of exciting MEMS microstructures in water, which comprises a support arranged on a substrate and an ellipsoid cavity, and the ellipsoid cavity is formed by connecting a lower cavity and an upper cavity. and the inner cavity forms more than half of an ellipsoid; there is a mounting seat in the lower cavity, and two needle electrodes are arranged on the upper end of the mounting seat; the needle points of the two needle electrodes are located on the cross section of the first focus of the ellipsoid; The microstructure unit is installed through a manual three-axis translation stage, and the microstructure unit is located at the second focal point of the ellipsoid; the needle electrodes are electrically connected to the two poles of the high-voltage capacitor, and the distance between the needle tips of the needle electrodes is less than the maximum value in water after the high-voltage capacitor is fully charged. The air breakdown gap; the two poles of the high-voltage capacitor are electrically connected to the positive and negative poles of the high-voltage power supply. The device can not only excite the MEMS microstructure in water, but also prevent the vibration response of the base structure from interfering with the test results, realize the non-contact excitation of the microstructure, and have good excitation effect.

Description

technical field [0001] The invention belongs to the technical field of micromechanical electronic systems, in particular to a focused shock wave excitation device capable of exciting MEMS microstructures in water. Background technique [0002] Due to the advantages of low cost, small size and light weight, MEMS microdevices have broad application prospects in many fields such as automobile, aerospace, information communication, biochemistry, medical treatment, automatic control and national defense. For many MEMS devices, the micro-displacement and micro-deformation of their internal microstructures are the basis for the realization of device functions. Therefore, accurate testing of dynamic characteristic parameters such as the amplitude, natural frequency, and damping ratio of these microstructures has become the key to developing MEMS products. important content. In addition, the dynamic characteristic test of MEMS microstructure needs to take into account the working en...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): B81C99/00
CPCB81C99/0035
Inventor 佘东生杨一柳于震萨初荣贵李琨
Owner BOHAI UNIV
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