A focused shock wave excitation device that can excite mems microstructures in water
An excitation device and microstructure technology, applied in the direction of microstructure devices, microstructure technology, etc., can solve problems such as the inability to apply microstructure excitation and the difficulty of microstructure dynamic characteristic parameters, and achieve easy dynamic characteristic parameters, energy concentration, and improved excitation. The effect of vibration
- Summary
- Abstract
- Description
- Claims
- Application Information
AI Technical Summary
Problems solved by technology
Method used
Image
Examples
Embodiment Construction
[0026] Such as Figure 1 to Figure 5 As shown, the present invention relates to a focused shock wave excitation device that can excite MEMS microstructures in water, including a substrate 1, on which a support 8 and an ellipsoid cavity 2 for containing water are fixed, The ellipsoid cavity 2 is formed by the lower cavity 201 and the upper cavity 202 being sealed and plugged together and connected by screws. The upper end of the upper cavity 202 is open so that the inner cavity of the ellipsoid cavity 2 forms a vertical More than half of the ellipsoid 203 arranged, the first focus of the ellipsoid 203 is located in the lower cavity 201, the second focus is located in the upper cavity 202; There is a second sealing ring 14 .
[0027] In the central hole at the bottom of the lower cavity, a support seat 18 is sealed and connected, the upper end of the support seat 18 is inserted into the lower cavity, and the upper end of the support seat 18 is connected with a connecting sleeve...
PUM
Abstract
Description
Claims
Application Information
- R&D Engineer
- R&D Manager
- IP Professional
- Industry Leading Data Capabilities
- Powerful AI technology
- Patent DNA Extraction
Browse by: Latest US Patents, China's latest patents, Technical Efficacy Thesaurus, Application Domain, Technology Topic, Popular Technical Reports.
© 2024 PatSnap. All rights reserved.Legal|Privacy policy|Modern Slavery Act Transparency Statement|Sitemap|About US| Contact US: help@patsnap.com