A precision direct-drive air-floating platform with adjustable damping

An air-floating platform and damping technology, which is applied to workbenches, manufacturing tools, etc., can solve the problems of complex damper structure, poor engineering applicability, and limited lifting damping value, so as to improve surface shape accuracy and surface quality, and optimize Vibration performance, vibration suppression effect

Active Publication Date: 2020-06-05
INST OF MACHINERY MFG TECH CHINA ACAD OF ENG PHYSICS
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  • Abstract
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  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

At present, the methods of improving the damping of the air bearing system at home and abroad include: improving the structure of the air bearing (CN2208639Y). Since the low damping of the air bearing is an inherent characteristic, this type of method has a limited value of lifting damping; magnetorheological fluid damping (CN105650191A), oil film Damping, this type of external damper has a complex structure, and the damping adjustability is poor, and the engineering applicability is not strong

Method used

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  • A precision direct-drive air-floating platform with adjustable damping
  • A precision direct-drive air-floating platform with adjustable damping

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Embodiment Construction

[0013] figure 1 It is the front view of the structure of the precision direct-drive air-flotation platform with adjustable damping of the present invention, figure 2 It is a side view of the precision direct-drive air bearing platform with adjustable damping of the present invention. from figure 1 , 2 It can be seen from the figure that the damping-adjustable precision direct-drive air flotation platform of the present invention includes a marble base 1, an air flotation left support mechanism 2, a workbench 3, a linear motor installation transition plate 4, an air flotation right support mechanism 5, and a grating Reading head 6, linear motor mover for driving 7, linear motor stator for driving 8, linear motor mover for damping 9, linear motor stator 10 for damping, grating ruler 11, first resistance adjustment knob 12, first adjustable resistance 13. The second resistance adjustment knob 14 , the second adjustable resistance 15 , the third resistance adjustment knob 16 ,...

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Abstract

The invention provides a precise direct-driving air-floating platform with adjustable damping. The precise direct-driving air-floating platform is characterized in that an air-floating left support mechanism and an air-floating right support mechanism of the platform are fixedly connected with a marble base; a worktable is connected with the air-floating left support mechanism and the air-floating right support mechanism; a grating reading head is fixedly arranged on a side surface of the worktable; a grating ruler is fixedly connected with the air-floating right support mechanism; a linear motor assembly transition plate is connected to the bottom of the worktable; a driving linear motor rotor and a damping linear motor rotor are fixedly connected with the linear motor assembly transition plate; and a driving linear motor stator and a damping linear motor stator are fixedly connected with the marble base. The precise direct-driving air-floating platform is a damping-adjustable high-precision positioning device, and is simple in structure and convenient to operate.

Description

technical field [0001] The invention belongs to the field of precision positioning devices, and in particular relates to an air floating platform with adjustable damping function and high-precision positioning. Background technique [0002] The direct-drive air-floating platform is a high-precision positioning device. It is driven by a linear motor and supported by an air bearing. With the advantages of high speed range and high dynamic performance, it truly realizes frictionless and "zero transmission", and is increasingly used in fields such as micro-nano processing, IC packaging, large-panel liquid crystal display manufacturing and testing, and optical scanning testing. middle. However, the damping of the air bearing support is small, and the direct drive air bearing platform is a low damping system that is susceptible to interference. Therefore, improving the damping of the system is conducive to obtaining better vibration suppression performance, high precision positio...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): B25H1/14
Inventor 陈东生张连新阳红王宝瑞刘有海宋颖慧张敏吕磊戴晓静
Owner INST OF MACHINERY MFG TECH CHINA ACAD OF ENG PHYSICS
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