The invention discloses an MEMS (micro-electromechanical
system)
microstructure non-contact excitation device based on shock
waves. The device comprises a substrate, a manual three-axis displacement table and a support, wherein a
microstructure unit is arranged on the manual three-axis displacement table; an ellipsoidal cavity with an inner cavity in a half ellipsoidal shape is formed at the upper end of the support, a first pin
electrode unit is arranged on one side of the ellipsoidal cavity, and the pinpoint of a first pin
electrode points to the first focus; the
microstructure unit is located at the second focus of the ellipsoidal surface; a second pin
electrode unit is arranged on the other side of the ellipsoidal cavity, and the pinpoint of a second pin electrode points to the first focus of the ellipsoidal surface. The first pin electrode and the second pin electrode are electrically connected with two poles of a high-
voltage capacitor respectively, and a first air switch is arranged between the high-
voltage capacitor and the first pin electrode; the two poles of the high-
voltage capacitor are electrically connected to the positive pole and the negative pole of a high-voltage power supply respectively and are controlled to be powered on or off through a second air switch. According to the device, interference of
vibration response of a base structure to a test result can be avoided, non-
contact type excitation of the MEMS microstructure is realized, and the excitation effect is good.