A kind of preparation method of biodetection chip

Abstract

The invention provides a magnetostrictive sensor based biological detection chip and a preparation method thereof. The biological detection chip comprises a substrate layer, a planar coil layer, a locating layer, a microflow system layer and one or more magnetostrictive biosensors, wherein the substrate layer, the planar coil layer, the locating layer and the microflow system layer are arranged sequentially from bottom to top, and the one or more magnetostrictive biosensors are placed between the locating layer and the microflow system layer; one or more locating grooves which are used for fixing the sensors are formed on the locating layer; the length direction of the sensors is vertical to parallel conducting wires of a planar coil in the planar coil layer; the microflow system layer comprises a detection area facing the sensors and a microflow corridor communicating with the detection area, a liquid outlet and a liquid inlet are separately formed in end parts of the microflow corridor, and a detection chamber is formed by the detection area and the locating layer covered by the detection area. The biological detection chip is prepared through forming the planar coil, the locating layer and the locating grooves on the substrate by sputtering, photoetching, electroplating, washing and corroding processes, and carrying out integration with the microflow system layer.

Description

technical field [0001] The invention relates to a detection chip, in particular to a magnetostrictive biosensor biological detection chip and a preparation method thereof. Background technique [0002] Resonant immune biosensors have the advantages of high sensitivity, easy operation, and no labeling, and are suitable for direct, real-time, in situ, and online trace biological detection. Magnetostrictive biosensor is a new resonant sensor technology developed in recent years. It is designed based on the principle of magnetostriction. The sensor itself is a strip-shaped elastic body based on amorphous soft magnetic material. Biosensitive material to which microorganisms specifically bind. Under the action of magnetostrictive effect, the magnetostrictive sensor in the alternating magnetic field will be forced to resonate along the length direction. When the specific immunoadsorption occurs between the measured object and the biosensitive layer on the surface of the sensor, th...

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Problems solved by technology

[0004] In short, the existing chip-level magnetostrictive biosensor technology still has the following problems: (1) The traditional method of using the solenoid coil technology to realize the excitation and detection of the sensor is not conducive to the integration of the chip-level detection system, especially with the microfluidic system. (2) In the liquid environment, especially in the flowing liquid, the position of the sensor relative to the coil is easy to change, thus affecting the accuracy of the detection results in the liquid environment; (3) the existing solenoid coil The detection system is not conducive to the measurement of the sensor array

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