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An electromagnetic vacuum annealing furnace

A vacuum annealing furnace, electromagnetic technology, applied in the direction of furnace, furnace type, heat treatment furnace, etc., can solve the problems of poor magnetic field uniformity, low temperature response sensitivity, slow heating and cooling rate, etc., to avoid excessive temperature of the magnetic pole, easy to Heating process, the effect of fast heating and cooling rate

Active Publication Date: 2018-09-28
48TH RES INST OF CHINA ELECTRONICS TECH GROUP CORP
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AI Technical Summary

Problems solved by technology

[0003] Most of the existing electromagnetic vacuum annealing furnaces use coils wound outside the vacuum chamber to generate a magnetic field in the sample area in the chamber. Due to the characteristics of the magnetic field lines, the uniformity of the magnetic field is not good; in addition, most of the existing electromagnetic vacuum annealing furnaces use resistance wire heating. Since the resistance wire itself has the characteristics of large thermal inertia and slow heating and cooling rate, and the heating of the resistance wire has problems such as low temperature response sensitivity, complicated winding, and pollution. What is more serious is that the heating current applied by the resistance wire will affect the temperature in the annealing furnace Magnetic field distribution, changing the magnetic field annealing environment of the sample

Method used

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Embodiment Construction

[0023] The present invention will be further described in detail below in conjunction with the accompanying drawings and specific embodiments.

[0024] Such as Figure 1 to Figure 4 As shown, the electromagnetic vacuum annealing furnace of this embodiment includes a vacuum chamber 1 and a sample holder 2 located in the vacuum chamber 1, and also includes a heat shield 3 located in the vacuum chamber 1, and at least one set of infrared lamp assemblies 4 and two magnetic poles 5 for generating a magnetic field, the sample holder 2 and the infrared lamp assembly 4 are located inside the heat shield 3, and the two magnetic poles 5 are located outside the heat shield 3 and symmetrically arranged on both sides of the sample holder 2. The vacuum annealing furnace uses infrared lamp assembly 4 for radiation heating, which is easy to control the heating process, has a fast heating and cooling rate, avoids pollution and complicated winding work, and does not affect the magnetic field di...

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Abstract

The invention discloses an electromagnetic vacuum annealing furnace which comprises a vacuum cavity and a sample holder positioned in the vacuum cavity, and further comprises a heat insulating screen positioned in the vacuum cavity, at least one group of infrared lamp tube assemblies and two magnetic poles used for generating magnetic fields, wherein the sample frame and the infrared lamp tube assemblies are positioned in the heat insulating screen; and the two magnetic poles are positioned outside the heat insulating screen and are symmetrically arranged at the two sides of the sample holder. The electromagnetic vacuum annealing furnace has the advantages of being quick in heating and cooling speed, small in pollution, free of influences on distribution of magnetic fields in the cavity in a heating process, and the like.

Description

technical field [0001] The invention relates to heat treatment equipment for semiconductor processing, in particular to an electromagnetic vacuum annealing furnace. Background technique [0002] The electromagnetic vacuum annealing furnace heats the sample in a vacuum state to prevent the sample from being oxidized or polluted at high temperature, and realizes the annealing of the sample through the time control of heating-insulation-cooling, so that the internal stress of the sample inside or on the surface of the membrane material can be obtained. release, so that the performance of the material is stabilized; for magnetic materials, it is also possible to obtain a directional magnetic field, which converts the performance of the material in a clean environment and realizes its special function. [0003] Most of the existing electromagnetic vacuum annealing furnaces use coils wound outside the vacuum chamber to generate a magnetic field in the sample area in the chamber. D...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): C21D1/04C21D1/773C21D9/00
CPCC21D1/04C21D1/773C21D9/00
Inventor 胡凡陈特超
Owner 48TH RES INST OF CHINA ELECTRONICS TECH GROUP CORP
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