Measuring device and method for surface shape error of rotational axis symmetric curved surface
A measuring device and surface shape error technology, which is applied in the field of optical measurement, can solve problems such as low measurement accuracy, inability to detect asymmetric deviation, and difficulty in installation and adjustment by optical fiber method, so as to achieve the effect of improving measurement accuracy
Inactive Publication Date: 2019-04-02
CHANGCHUN INST OF OPTICS FINE MECHANICS & PHYSICS CHINESE ACAD OF SCI
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Problems solved by technology
Both the template method and the profiler detection method belong to contact detection, which is easy to scratch the cylindrical surface to be measured, and the measurement accuracy is low, currently only in the order of microns; the auxiliary plane method cannot detect the asymmetric deviation in the shape of the cylindrical surface; the optical fiber method Difficult to assemble and adjust, poor practicability, affecting the accuracy of cylindrical surface detection; standard cylindrical surface method requires standard cylindrical surface, which is quite expensive and difficult to process
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[0033] Certain embodiments of the invention will be described more fully hereinafter with reference to the accompanying drawings, in which some, but not all embodiments are shown. Indeed, various embodiments of the invention may be embodied in many different forms and should not be construed as limited to these set forth embodiments; rather, these embodiments are provided so that this invention will satisfy applicable legal requirements.
[0034] In order to make the object, technical solution and advantages of the present invention clearer, the present invention will be described in further detail below in conjunction with specific embodiments and with reference to the accompanying drawings.
[0035] In order to better describe the spatial relationship between the components of the present invention, the horizontal left-right direction is defined as the X-axis, the horizontal front-back direction is defined as the Y-axis, and the vertical direction is defined as the Z-axis.
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The invention provides a measurement device and a measurement method for measuring the surface-shape error of a rotating-axis symmetric curved surface. The measurement device comprises a base, a rotating platform arranged on the base and used for driving a to-be-measured object to rotate around a rotating axis, a laser measuring system used for scanning and sampling the to-be-measured surface of the to-be-measured object during the rotating process of the to-be-measured object so as to obtain the data of a plurality of sampling points, and a calculation device used for calculating the surface-shape error based on the geometric parameters of the to-be-measured surface and the data of a plurality of sampling points. The measurement device and the measurement method can realize the zero-damage detection.
Description
technical field [0001] The invention relates to the field of optical measurement, in particular to a measuring device and a measuring method for a surface shape error of a rotationally symmetrical curved surface. Background technique [0002] Most of the curved surfaces of the lenses and mirrors in the optical system are flat and spherical. The reason is that these simple curved surfaces are easy to process and detect, can be mass-produced, and are easy to meet high-precision surface requirements. The emergence of a high-precision surface shape detection interferometer greatly reduces the difficulty of high-precision plane and spherical surface shape detection. At the same time, the unique optical properties of the aspheric surface have attracted people's attention, and gradually replaced the status of spherical and flat surfaces, playing an increasingly important role in the optical system. [0003] Among them, the cylindrical surface is a special aspheric surface, and its...
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IPC IPC(8): G01B11/24
CPCG01B11/2441
Inventor 彭石军苗二龙高松涛曲艺苏东奇隋永新杨怀江
Owner CHANGCHUN INST OF OPTICS FINE MECHANICS & PHYSICS CHINESE ACAD OF SCI