Precision measurement method for one-dimensional displacement

Abstract

The invention belongs to a measurement method class and particularly relates to a precision measurement method for one-dimensional displacement. The precision measurement method is characterized by including that an emission electrode insulating substrate is installed on a fixed reference object, a receiving electrode insulating substrate is installed on a moving object, emitting electrodes and receiving electrodes are kept parallel, small air gaps are reserved between the emitting electrodes and the receiving electrodes, a high-frequency sinusoidal voltage source stable in frequency and amplitude is utilized to excite an odd-number electrode interconnecting bus of the emitting electrodes, a high-frequency sinusoidal voltage source identical in frequency and opposite in amplitude and phase position is utilized to excite an even-number electrode interconnecting bus of the emitting electrodes, two interconnecting buses of the receiving electrodes are respectively connected to a signal detection circuit, and displacement, motion speed and motion direction of the to-be-detected object corresponding to the fixed object can be calculated by judgment of relative relation of amplitude of two high-frequency voltage output signals and the phase positions of the receiving electrodes. The precision measurement method is flexible, high in measurement precision, low in requirements on mounting precision of a sensing part and easy to promote and apply in low-cost automation devices.

Description

technical field [0001] The invention belongs to the category of measurement methods, in particular to a precise measurement method for one-dimensional displacement. Background technique [0002] In the fields of production, life and scientific research, it is often necessary to accurately measure the linear displacement, angular displacement, and spatial displacement of various devices. The measurement of spatial displacement, angular displacement, and linear displacement can be realized by a reasonable combination of single or multiple one-dimensional displacement measuring devices. Traditional one-dimensional displacement measurement methods include linear variable differential transformer detection, linear resistance detection, grating detection, magnetic grid detection, capacitance grid detection, etc., corresponding to the application of one-dimensional linear displacement detection, it is a length meter or a reference ruler, corresponding to One-dimensional rotary dis...

AI Technical Summary

Problems solved by technology

[0003] In the current field of precision displacement measurement, in the application of micro-displacement measurement, capacitive effect displacement sensors that cause changes in electrostatic capacitance through changes in the distance between plates and inductive effect displacement sensors that cause changes in inductance through changes in the position of the magnetic core occupy a dominant position. The obvious advantages of simplicity, low cost, and high resolution, but there are also limitations in measurement errors and drifts that are susceptible to interference from the electromagnetic environment

In the application of large-scale displacement measurement, the grating ruler and rotary encoder based on the grating measurement method occupy a dominant position. They have the advantages of strong anti-electromagnetic interference, high measurement accuracy and good stability, but they also have high cost and environmental impact. Pollution-sensitive limitations, such as oil pollution, water pollution, dust pollution, etc.

The above factors make the current precision displacement measurement devices mainly used in the field of scientific research and a small number of high-end manufacturing equipment. In the large amount of general production equipment and various daily devices, displacement precision measurement devices are still rarely used.

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