Measurement device and measurement method for measuring surface-shape error of rotating-axis symmetric curved surface

Abstract

The invention provides a measurement device and a measurement method for measuring the surface-shape error of a rotating-axis symmetric curved surface. The measurement device comprises a base, a rotating platform arranged on the base and used for driving a to-be-measured object to rotate around a rotating axis, a laser measuring system used for scanning and sampling the to-be-measured surface of the to-be-measured object during the rotating process of the to-be-measured object so as to obtain the data of a plurality of sampling points, and a calculation device used for calculating the surface-shape error based on the geometric parameters of the to-be-measured surface and the data of a plurality of sampling points. The measurement device and the measurement method can realize the zero-damage detection.

Description

Technical field [0001] The invention relates to the field of optical measurement, in particular to a device and method for measuring the surface shape error of a rotationally symmetric curved surface. Background technique [0002] Most of the curved surfaces of the lenses and mirrors in the optical system are flat and spherical. The reason is that these simple curved surfaces are easy to process and detect, can be mass-produced, and easily meet the requirements of high-precision surface shapes, especially The emergence of a high-precision surface shape detection interferometer greatly reduces the difficulty of high-precision flat and spherical surface shape detection. At the same time, the unique optical properties of the aspheric surface have attracted people's attention, and gradually replaced the position of the spherical surface and the plane, playing an increasingly important role in the optical system. [0003] Among them, the cylindrical surface is a special aspheric surfac...

AI Technical Summary

Problems solved by technology

Both the template method and the profiler detection method belong to contact detection, which is easy to scratch the cylindrical surface to be measured, and the measurement accuracy is low, currently only in the order of microns; the auxiliary plane method cannot detect the asymmetric deviation in the shape of the cylindrical surface; the optical fiber method Difficult to assemble and adjust, poor practicability, affecting the accuracy of cylindrical surface detection; standard cylindrical surface method requires standard cylindrical surface, which is quite expensive and difficult to process

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