Concave grating diffraction efficiency test instrument

Abstract

The invention discloses a concave grating diffraction efficiency test instrument, which comprises a light source system, a measuring monochromator and a Fourier spectrum measurement system, wherein the Fourier spectrum measurement system comprises a second casing, a collimating mirror, a beam splitting cube, a fixed pyramid A, a movable pyramid A and a collecting mirror; the second casing is provided with a second incident hole; the collimating mirror, the beam splitting cube A, the fixed pyramid A, the movable pyramid A and the collecting mirror are arranged in the second casing and are in sequential arrangement in the light path transmission direction; the light emitted into the first casing through a first incident hole can be directly irradiated onto an element to be tested arranged on a support able, is gathered onto an emergent arm through an element to be measured, and is further irradiated onto a main detector through the emergent arm. The concave grating diffraction efficiency test instrument can effectively solve the problems that the concave gating to be tested and a standard reflecting mirror have different emergent spectrum width; the grating lamination exists; the instrument stray light is great; the light source stability is poor; the measurement precision is influenced.

Description

technical field [0001] The invention relates to the field of spectroscopic technology, in particular to a concave grating diffraction efficiency tester. Background technique [0002] As the core spectroscopic device of spectroscopic instruments, concave gratings are widely used in spectral analysis, frontier interdisciplinary subjects, social and people's livelihood and other fields. The concave grating has both the functions of dispersion and light beam focusing, which can simplify the optical path and greatly promote the miniaturization and light weight of spectroscopic instruments. With the development of the concave grating manufacturing process, the concave grating with excellent performance such as aberration correction, low stray light, no ghost line and high signal-to-noise ratio is becoming more and more important in the application field of spectroscopic instruments. Therefore, the manufacturing and Measurement technology is particularly critical. [0003] The di...

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Problems solved by technology

[0006] However, the absolute and relative diffraction efficiencies of concave gratings cannot be measured simultaneously by using the above-mentioned testing instruments. The area of ​​the component to be tested is limited, and the inconsistency of the output spectrum width of the grating to be tested and the standard reflector cannot be avoided, the grating stacks, the stray light of the instrument is large, and The poor stability of the light source affects the measurement accuracy. At the same time, the pre-monochromator needs to be calibrated regularly, and the single-wavelength mode of one measurement affects its detection efficiency.

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