Pump position feedback type dispenser and dispensing method
A technology of pump position and dispenser, which is applied to the device for coating liquid on the surface, semiconductor/solid-state device manufacturing, coating, etc., and can solve the problem of the degradation of the accuracy of the position of viscous liquid
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[0039] The present invention will now be described more fully with reference to the accompanying drawings.
[0040] figure 1 is a schematic diagram of a pump position feedback type dispenser according to an embodiment of the present invention, and figure 2 Yes figure 1 A cross-sectional view of the pump of the pump position feedback dispenser illustrated in .
[0041] refer to figure 1 and figure 2 , the pump position feedback type dispenser according to the present invention includes: a pump 100 , a pump moving unit 200 , a camera 300 and a control unit 500 .
[0042] The pump position feedback type dispenser according to the present invention is an apparatus for coating a plurality of workpieces with a viscous liquid by using the pump 100 . In the pump position feedback type dispenser according to the present invention, various types of pumps can be used. For example, in this embodiment, as a figure 2 A pump 100 of a piezoelectric pump of the structure described in...
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