Unlock instant, AI-driven research and patent intelligence for your innovation.

cryopump

A cryopump, low temperature technology, used in pumps, liquid variable capacity machinery, machines/engines, etc., can solve the problems of cryopump pressure rise, cryopump can not be fully utilized, etc., to achieve the effect of improving the occlusion limit

Active Publication Date: 2019-05-28
SUMITOMO HEAVY IND LTD
View PDF6 Cites 0 Cited by
  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

In this way, the gas will vaporize again at the contact point, which will cause the pressure inside the cryopump to rise
Afterwards, the cryopump cannot fully perform its original function of exhausting the vacuum chamber

Method used

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
View more

Image

Smart Image Click on the blue labels to locate them in the text.
Viewing Examples
Smart Image
  • cryopump
  • cryopump
  • cryopump

Examples

Experimental program
Comparison scheme
Effect test

Embodiment Construction

[0019] Hereinafter, embodiments of the present invention will be described in detail with reference to the drawings. Hereinafter, in the specification and drawings, the same or equivalent constituents, components, and processes are given the same reference numerals, and redundant descriptions are appropriately omitted. For the convenience of description, the scale and shape of each part are appropriately set in the drawings, and unless otherwise mentioned, they should not be construed as limiting. The embodiments are merely examples and do not limit the scope of the present invention in any way. All of the features described in the embodiments or combinations thereof do not necessarily constitute the essence of the invention.

[0020] figure 1 It is a plan view schematically showing the cryopump 10 according to the first embodiment. figure 2 is indicative of figure 1 A diagram showing a cross-section of the cryopump 10 along line A-A.

[0021] The cryopump 10 is installe...

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More

PUM

No PUM Login to View More

Abstract

The present invention provides a cryopump whose object is to increase the occlusion limit of the cryopump. The cryopump of the present invention includes: a refrigerator including a first cooling stage, a second cooling stage having a front end table, and a refrigerator structure extending in the axial direction from the first cooling stage toward the second cooling stage; a radiation shield, It is thermally connected with the first cooling table. The radiation shield has a front end of the shield and a bottom of the shield. The front end of the shield defines the main opening of the shield. The bottom of the shield has a refrigerator insertion hole, and the refrigerator is inserted through the hole so that the front table faces the shield. The main opening accepts the structure part of the refrigerator; the cap part surrounds the front end table without contacting the front end table, and the cap part is thermally connected to the first cooling stage; and the secondary cryopanel is arranged on the cap in the axial direction. Between the component and the first cooling stage, and the secondary cryopanel is thermally connected with the second cooling stage.

Description

[0001] This application claims priority based on Japanese Patent Application No. 2016-066196 filed in Japan on March 29, 2016. The entire contents of this Japanese application are incorporated herein by reference. technical field [0002] The invention relates to a cryopump. Background technique [0003] A cryopump is a vacuum pump that traps gas in a cryopanel cooled to an ultra-low temperature by condensation or adsorption. Thus, the cryopump exhausts the vacuum chamber in which the cryopanel is mounted. [0004] A cryopump generally includes a first cryopanel cooled to a certain temperature and a second cryopanel cooled to a temperature lower than the certain temperature. The first cryopanel includes a radiation shield. As the cryopump is used, a condensed layer of gas grows on the second cryopanel. There is a possibility that the condensed layer may come into contact with the radiation shield or a part of the first cryopanel. As a result, the gas is vaporized again ...

Claims

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More

Application Information

Patent Timeline
no application Login to View More
Patent Type & Authority Patents(China)
IPC IPC(8): F04B37/08
CPCF04B37/08F04B37/085
Inventor 及川健
Owner SUMITOMO HEAVY IND LTD
Features
  • R&D
  • Intellectual Property
  • Life Sciences
  • Materials
  • Tech Scout
Why Patsnap Eureka
  • Unparalleled Data Quality
  • Higher Quality Content
  • 60% Fewer Hallucinations
Social media
Patsnap Eureka Blog
Learn More

Browse by: Latest US Patents, China's latest patents, Technical Efficacy Thesaurus, Application Domain, Technology Topic, Popular Technical Reports.

© 2025 PatSnap. All rights reserved.Legal|Privacy policy|Modern Slavery Act Transparency Statement|Sitemap|About US| Contact US: help@patsnap.com