Built-in cryopump

A low-temperature pump, built-in technology, applied in pumps, liquid displacement machines, machines/engines, etc., can solve the problems of insufficient regeneration, long regeneration time, low absorption speed and absorption limit, etc., and achieve the improvement of the absorption limit , The effect of increasing the effective area and increasing the adsorption speed

Active Publication Date: 2021-12-10
ZHEJIANG BWOKAI TECH
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0007] (1) The area of ​​the pump port greatly limits the pumping speed of the cryopump;
[0008] (2) The distance between the cold plate and the suction port is inconsistent, and the occlusion of the cold plate is not easy to achieve uniform saturation, which limits the total occlusion limit;
[0009] (3) The existence of the pump port also makes the gas flow path more complicated, it is difficult for the gas molecules to escape during the regeneration process, the regeneration time is long, and the regeneration is insufficient
[0010] At present, the patent name is cryopump, and the patent number is 201710173160.X invention patent, but there are still defects of low absorption speed and absorption limit

Method used

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Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0035] The built-in cryopump, as shown in the figure, includes a refrigerator 1 and a cold plate assembly 2, the refrigerator 1 is connected to the cold plate assembly 2 and cools the cold plate assembly 2, and also includes a pump port flange 3, the refrigerator 1 and the cold plate The components 2 are fixed on the pump port flange 3, and the pump port flange 3 cooperates with the opening of the vacuum chamber 4 to realize sealing. The cold plate assembly 2 extends into the vacuum chamber 4 and passes through the pump port flange 3 to fix.

[0036] It also includes a heating rod 4 connected to the cold plate assembly 2, and the heating rod 4 is located in the chamber 5 to be vacuumed.

[0037] After abandoning the shell of the traditional cryopump, we regenerate the cryopump with built-in electric heating, and complete the rapid temperature rise of the cold plate by fixing the heating rod 4 directly on the cold head near the cold plate. During regeneration, since there is n...

Embodiment 2

[0046] Same as Embodiment 1, the difference is that the primary cold plate 21 includes a primary base plate 211 and a plurality of primary louvers 212, the primary base plate 211 is an annular plate or a circular plate, and the primary louver plates 212 are placed vertically and circled Fixed on the primary bottom plate 211, the primary bottom plate 211 is provided with a plurality of first bottom plate holes, the first bottom plate holes are in groups of two, each group of first bottom plate holes corresponds to a primary louver 212, and the primary louver 212 It is fixed on the primary bottom plate 211 through the rivets matched with the holes of the first bottom plate.

[0047] Each primary louver 212 includes a first plate 2121 and a second plate 2122, the angle between the first plate 2121 and the second plate 2122 is 135° and the angle is defined as the inner angle of the primary louver 212, The inner corners of the primary louvers 212 are set inwards towards the central...

Embodiment 3

[0055] Same as Embodiment 1, the difference is that the secondary cold plate 22 includes a fixed plate 221 and a plurality of secondary louvers 222, the secondary bottom plate 221 is an annular plate or a circular plate, and the secondary louvers 222 are vertically placed and fixed on the circumference On the secondary bottom plate 221, a plurality of second bottom plate holes are arranged on the secondary bottom plate 221, and the second bottom plate holes are in groups of two, and each group of second bottom plate holes corresponds to a secondary louver 222, and the secondary louver 22 passes through The rivets matched with the holes of the second bottom plate are fixed on the secondary bottom plate 221 .

[0056] Each secondary louver 222 includes a third plate 2221 and a fourth plate 2222, the angle between the third plate 2221 and the fourth plate 2222 is 125° and the angle is defined as the inner angle of the secondary louver 222, The inner corners of the secondary louve...

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Abstract

The invention relates to the technical field of cryopumps, and discloses a built-in cryopump, which includes a refrigerator (1) and a cold plate assembly (2). The refrigerator (1) is connected to the cold plate assembly (2) and cools the cold plate assembly (2). ), including the pump port flange (3), the refrigerator (1) and the cold plate assembly (2) are fixed on the pump port flange (3), and the pump port flange (3) is connected with the chamber to be vacuumed ( The opening of 5) cooperates and realizes sealing, and the cold plate assembly (2) extends into the chamber to be vacuumed (5) and is fixed by the pump port flange (3). The invention adopts no pump shell design and is built into the cavity cavity, so that the cold plate assembly can fully contact the gas in the cavity, which makes the adsorption of the gas by the cold plate assembly more uniform, the effective area is increased, and the adsorption speed is higher than that of the traditional cryopump. At the same time, due to the increase in its effective area, the gas occlusion limit of the cold plate assembly also has an order of magnitude increase.

Description

technical field [0001] The invention relates to the field of cryopumps, in particular to a built-in cryopump. Background technique [0002] A cryopump is a vacuum pump that condenses gas on a low-temperature surface, also known as a condensation pump. Cryopumps can obtain a clean vacuum with the highest pumping rate and the lowest ultimate pressure, and are widely used in the research and production of semiconductors and integrated circuits, as well as molecular beam research, vacuum coating equipment, vacuum surface analysis instruments, ion implanters and space simulation devices, etc. aspect. [0003] In daily use, the cryopump is installed on the vacuum chamber of the vacuum processing device. Since the cryopump adopts the low-temperature adsorption principle, after working for a period of time, a gas condensed frost layer is formed on the surface of the primary cold plate and the secondary cold plate. When the frost layer is too thick, the surface temperature of the c...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): F04B37/08
CPCF04B37/08
Inventor 陈家富冯寅兵呼鹏
Owner ZHEJIANG BWOKAI TECH
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