scanning microscope

A scanning microscope and objective lens technology, applied in the field of scanning microscopes, can solve the problem of inaccurate spectral characteristics of the detector

Active Publication Date: 2021-06-08
LEICA MICROSYSTEMS CMS GMBH
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  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

The smaller the edge slope, the less precise the spectral characteristics of the detector

Method used

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Embodiment Construction

[0085] Refer below figure 1 The properties of the spectrally selective component 10, which is used according to the invention in a non-descanned detection unit for influencing the spectrum of the detection beam, will first be explained.

[0086] in accordance with figure 1 In an embodiment of the invention, the spectrally selective member 10 is a variable dichroic edge filter, such as a long-pass filter or a short-pass filter. As a long-pass filter, an edge filter transmits the spectrum above a predetermined boundary wavelength or spectral edge, while as a short-pass filter it transmits light below this predetermined boundary wavelength or spectral edge spectrum. However, it should be pointed out that the following explanations are not restricted to optical filters, but correspondingly also apply to the case where the component 10 according to the invention forms a spectrally selective beam splitter which transmits the spectrum above the spectral edge, Instead, the spectral...

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Abstract

The invention relates to a scanning microscope (20), comprising: an objective lens (48) arranged in an illumination optical path (26), used to focus an illumination beam (24) on a sample (52); A scanning unit (38) arranged upstream of the objective lens (48) is used to deflect the illuminating beam (24), so that the illuminating beam (24) focused by the objective lens (48) performs a scanning motion on the sample (52); The detection unit (58) in the detection optical path (66) is used for receiving the detection beam (54) that has not been deflected by the scanning unit. The detection unit comprises, for influencing the spectrum of the detection beam (54), at least one spectrally selective member (10), which has an active surface (12) with a spectral edge, which follows the detection beam (54) on the active surface ( 12) depending on the incident position. The active surface (12) of the spectral selection member (10) is arranged at the imaging position of the pupil (50) of the objective lens in the detection optical path (66), or is arranged obliquely to the optical axis of the detection optical path.

Description

technical field [0001] The present invention relates to a scanning microscope, which comprises: an objective lens arranged in an illumination optical path for focusing an illumination beam on a sample; a scanning unit arranged upstream of the objective lens in an illumination optical path for deflecting an illumination beam, The irradiation light beam focused by the objective lens performs a scanning motion on the sample; and a detection unit arranged in the detection optical path, the detection unit is used to receive the detection light beam not deflected by the scanning unit, wherein the detection unit is configured to affect the spectrum of the detection light beam At least one spectrally selective member is included, the member has an active surface whose spectral edge varies with the incident position of the detection beam on the active surface. Such optical components are also referred to as distribution filters or variable beam splitters or variable filters. Backgrou...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G02B21/00G02B5/28
CPCG02B21/0076G02B5/28G02B21/0064
Inventor H·古杰尔F·诺伊加特I·波姆
Owner LEICA MICROSYSTEMS CMS GMBH
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