Wire grid polarization element and projection type display apparatus
一种线栅偏振、显示装置的技术,应用在偏振元件、利用投影装置图像重现器、放映装置等方向,能够解决水分或氧气侵入、易发生腐蚀或氧化等问题
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Embodiment approach 1
[0027] (Structure of wire grid polarizing element 1)
[0028] figure 1 It is an explanatory diagram showing the appearance of the wire grid polarizing element 1 of the first embodiment of the present invention. figure 2 Yes figure 1 A cross-sectional view of the wire grid polarizing element 1 shown. figure 1 with figure 2 The wire grid polarizing element 1 shown has a translucent first substrate 2 and a metal wire grid 4 formed on one surface 2 a of the first substrate 2. The wire grid 4 is composed of a plurality of thin metal wires 41 arranged in parallel, and the thickness and the space (interval between the thin metal wires 41) of the thin metal wires 41 are, for example, 400 nm or less. In this embodiment, the thickness and space of the thin metal wires 41 are, for example, 100 nm to 200 nm, respectively. In the wire grid 4 constructed in this way, as long as the pitch of the thin metal wires 41 is sufficiently shorter than the wavelength of the incident light, the first c...
Embodiment approach 2
[0043] Figure 4 It is a cross-sectional view of the wire grid polarizing element 1 of the second embodiment of the present invention. In addition, since the basic structure of the present embodiment is the same as that of the first embodiment, the same reference numerals are given to the common parts, and their description is omitted.
[0044] In the first embodiment, the recess 21 is formed on the first substrate 2, but in this embodiment, the recess 31 is formed on the second substrate 3. More specifically, Figure 4 The wire grid polarizing element 1 shown has a light-transmitting first substrate 2 and a metal wire grid 4 formed on one surface 2a of the first substrate 2 as in the first embodiment. The wire grid 4 (the thin metal wire 41) is composed of an alloy containing aluminum as a main component, silver, or an alloy containing silver as a main component. In addition, a translucent second substrate 3 facing one surface 2a of the first substrate 2 is provided, and the sp...
Embodiment approach 3
[0048] Figure 5 It is an explanatory diagram showing an enlarged view of the wire grid 4 of the wire grid polarizing element 1 of the third embodiment of the present invention. In addition, since the basic structure of the present embodiment is the same as that of the first embodiment, the same reference numerals are given to the common parts, and their description is omitted. In the first and second embodiments, the wire grid 4 is formed by only the thin metal wires 41, but it may be like Figure 5 As shown, the present invention is applied to a case where the light absorbing layer 51 of silicon, germanium, or the like is formed at the end of the wire grid 4 on the opposite side of the first substrate 2 (the end of the thin metal wire 41). According to this structure, it is possible to suppress reflection of light incident on the wire grid 4 from the side of the second substrate 3.
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