A high-efficiency metasurface device based on catenary structure
A catenary and high-efficiency technology, applied in instruments, nonlinear optics, optics, etc., can solve the problems of low efficiency of discrete regulation, low diffraction efficiency of devices, and increased processing difficulty, achieving simple structure, low loss, and improved efficiency effect
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[0033] Without loss of generality, this embodiment designs a high-efficiency metasurface device for the mid-infrared band of 10.6 μm, and this invention is also applicable to the optical band, terahertz band and microwave band. Such as figure 1 As shown, the unit structure includes: a dielectric substrate 2 and a dielectric catenary grating structure 1 . Wherein, both the substrate and the catenary grating structure are made of silicon. The thickness h of the catenary grating structure is 4.7 μm, the longitudinal period of the catenary Py=3.3 μm, the span of the catenary l=0.75Px, and the width of the catenary w 1 The maximum value of is 1.2 μm, and the number of vertical gratings m=round(0.375Px / Py), where round represents a rounding function. In this embodiment, CST electromagnetic simulation software is used to simulate and test the performance of the device. During the simulation process, the refractive index of silicon is set to 3.36.
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