Porous quartz material and preparation method thereof

A technology of porous quartz and quartz, applied in glass manufacturing equipment, manufacturing tools, glass molding, etc., can solve problems such as short service life and high density of insulation materials, and achieve long service life, strong support strength and light weight.

Active Publication Date: 2018-11-30
YANGTZE OPTICAL FIBRE & CABLE CO LTD
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  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0004] Aiming at the above defects or improvement needs of the prior art, the present invention provides a porous quartz material and its preparation method, the purpose of which is to prepare low-density, high-strength, high-purity, machinable and heat-insulating properties by spin deposition Good high-temperature-resistant porous quartz material, thereby solving the technical problems of high-temperature-resistant quartz insulation materials with high density and short service life in the prior art

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  • Porous quartz material and preparation method thereof

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[0026] The preparation method of porous quartz material provided by the invention comprises the following steps:

[0027] (1) The quartz particle raw material is brought into the blowtorch, heated by the blowtorch until the surface is melted, and deposited by a rotary deposition method to form a loose deposited quartz body; preferably, the rotary deposition method uses a rotary deposition furnace built in the blowtorch, hydrogen The flow control is 60slm to 120slm, the oxygen flow control is 42slm to 80slm, and the ratio of hydrogen to oxygen is controlled at 1.4:1~1.8:1.

[0028] (2) Control the tip temperature of the deposited quartz body in step (1) at 1600°C to 1900°C, preferably 1650°C to 1800°C; control the furnace temperature to be stable at 1150°C to 1500°C, preferably control the furnace temperature at 1170°C to 1142°C ; The speed at which the tip of the deposited quartz body falls in the furnace is controlled to be 1.2mm / min-8mm / min, preferably 1.8-3mm / min.

[0029]...

Embodiment 1

[0038] The preparation method of the porous quartz material provided by the invention is applied as figure 1 The rotary deposition furnace shown includes the following steps:

[0039] Furnace preheating: Blowtorch 105 connected to H at the same time 2 Pipeline 102, O 2 The pipeline 103 and the feeding system 101, the feeding system can use hydrogen or oxygen as the carrier gas to bring the raw materials into the torch, and can also control the feeding by rotating shafts, rotating disks, etc.; hydrogen and oxygen are ignited to form oxyhydrogen flames 104. In the present invention, in order to ensure sufficient hydrogen combustion, the hydrogen flow rate is controlled to be 60-120 slm, the oxygen flow rate is controlled to be 42-80 slm, the ratio of hydrogen to oxygen is controlled at 1.4:1-1.8:1, and the blowtorch is placed in the furnace chamber 107 Inside, the blowtorch 105 is located above the furnace cavity, and the furnace is preheated with flames. At the same time, the...

Embodiment 2

[0048] The preparation method of the porous quartz material provided by the invention is applied as figure 1 The rotary deposition furnace shown includes the following steps:

[0049] Furnace preheating: Blowtorch 105 connected to H at the same time 2 Pipeline 102, O 2 The pipeline 103 and the feeding system 101, the feeding system can use hydrogen or oxygen as the carrier gas to bring the raw materials into the torch, and can also control the feeding by rotating shafts, rotating disks, etc.; hydrogen and oxygen are ignited to form oxyhydrogen flames 104. In the present invention, in order to ensure sufficient hydrogen combustion, the hydrogen flow rate is controlled to be 60-120 slm, the oxygen flow rate is controlled to be 42-80 slm, the ratio of hydrogen to oxygen is controlled at 1.4:1-1.8:1, and the blowtorch is placed in the furnace chamber 107 Inside, the blowtorch 105 is located above the furnace cavity, and the furnace is preheated with flames. At the same time, the...

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Abstract

The invention discloses a porous quartz material and a preparation method thereof. The porous quartz material has a closed porous structure, the density is in a range from 0.6 g / cm<3> to 2.1 g / cm<3>,the purity is 99% or above, and the alkali metal content is 50 ppm or below. The preparation method comprises the following steps: (1) introducing a quartz particle raw material into a blow lamp, carrying out heating by using the blow lamp until the surfaces of the quartz particle raw material are melted, and adopting a rotary deposition method for forming a loose deposited quartz body; (2) controlling the tip temperature of the deposited quartz body to be 1600 DEG C to 1900 DEG C, controlling hearth temperature to be stabilized at 1150 DEG C to 1500 DEG C, and controlling the descending speedof the substrate to be between 1 mm / min and 8 mm / min; and (3) stopping deposition, and directly carrying out cooling without annealing. According to the invention, the addition of foaming agents andother materials is not needed, and the quartz material with a porous structure can be formed by directly depositing quartz sand. The preparation can be completed by applying an existing rotary deposition furnace, the development cost is low, and the production efficiency is high.

Description

technical field [0001] The invention belongs to the field of quartz material preparation, and more specifically relates to a porous quartz material and a preparation method thereof. Background technique [0002] High-temperature-resistant insulation materials have broad application prospects. For example, in existing high-temperature firing furnaces, including refractory bricks used in muffle furnaces, firing furnaces, kilns, etc., and semiconductor preparation processes require high-purity High temperature resistant insulation material, to avoid the impact of impurities in the insulation material on the quality of semiconductor products. [0003] Considering high temperature resistance, machining performance, and thermal insulation performance, the best high temperature thermal insulation material is quartz brick. However, the existing quartz brick is a quartz material with many internal bubbles formed by adding a foaming agent. Due to the addition of a foaming agent, alka...

Claims

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Application Information

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IPC IPC(8): C03B20/00
CPCC03B20/00
Inventor郭飞李志涛陈刚熊良明罗杰
OwnerYANGTZE OPTICAL FIBRE & CABLE CO LTD