Temperature compensating quartz crystal pressure sensor
A technology of pressure sensor and quartz crystal, applied in the direction of measuring fluid pressure, measuring fluid pressure through mechanical components, instruments, etc., can solve the problem that the quartz crystal pressure sensor does not have temperature compensation, etc., to eliminate the influence of temperature on the pressure sensor, production Simple structure and low manufacturing cost
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[0024] The technical solutions in the present invention will be further described in detail below in conjunction with specific embodiments.
[0025] A temperature-compensated quartz crystal pressure sensor disclosed in the present invention includes a sensor, a temperature and pressure sensing element, the temperature and pressure sensing element includes a temperature sensing element and a pressure sensing element, and the temperature sensing element and the pressure sensing element are arranged on the sensor In the same cavity; the temperature sensing element is a reference crystal, and the pressure sensing element is a pressure sensing crystal.
[0026] Specifically, the sensor of the present invention includes a sensor upper body, a sensor middle body, and a sensor lower body that can be connected to each other. One end of the lower body of the sensor is connected, and the inner cavity at the end of the joint constitutes the lower sensing cavity; the upper sensing cavity c...
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