Wide-range air velocity transducer and manufacturing method thereof

Abstract

The invention relates to a wide-range air velocity transducer and a manufacturing method thereof. The wide-range air velocity transducer comprises a substrate (1), an elastic thin film (2), a heatingelement (5), a protruded table top (6), a thermal insulating layer (7), four pressure transducers (31) and four temperature transducers (41). On the basis of the design scheme, hardware is combined toconstitute the wide-range air velocity transducer, and correspondingly, the invention further relates to the manufacturing method of the wide-range air velocity transducer; thus according to the whole technical scheme, the thermal transducer principle is adopted, and air velocity and direction data can be accurately measured under the low air velocity; the piezoresistive effect is adopted, and air velocity and direction data can be accurately measured under the high air velocity; a bulk-silicon micromachining technology is adopted, the process is reliable, batch manufacturing is easy, and thecost is low; and not only that, a two-dimensional symmetrical structure is further adopted, and temperature drift is small.

Description

technical field [0001] The invention relates to a wind speed sensor with a wide range and a manufacturing method thereof, belonging to the technical field of wind speed measurement. Background technique [0002] Wind speed and wind direction are very important parameters that characterize the meteorological situation. The detection of wind speed and wind direction has an important impact on environmental monitoring, air conditioning and industrial and agricultural production. Therefore, it is of great practical significance to quickly and accurately measure wind speed and wind direction. Traditional wind cups and wind vanes are still widely used detection devices, but these devices are large in size, not sensitive enough to low wind speed measurement, and the mechanical rotating structure is easy to wear; ultrasonic wind sensors are another commonly used wind sensor, this sensor High precision, but factors such as large volume and high cost limit its application field. Ther...

AI Technical Summary

Problems solved by technology

Traditional wind cups and wind vanes are still widely used detection devices, but these devices are large in size, not sensitive enough to low wind speed measurement, and the mechanical rotating structure is easy to wear; ultrasonic wind sensors are another commonly used wind sensor, this sensor High precision, but factors such as large volume and high cost limit its application field

Thermal wind sensors reflect wind speed information by measuring heat loss or thermal symmetry. This type of sensor is more sensitive to low wind speeds, and the structure can also be made small, but the problem of small measurement range limits its use in two-dimensional wind speed measurement. Promoted application of

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