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High-purity ammonia product detection system and detection method thereof

A detection system and detection method technology, applied in the direction of measuring devices, instruments, scientific instruments, etc., can solve problems such as product pollution, detection failure, lack, etc., and achieve the effect of avoiding pipeline pollution and preventing pollution

Inactive Publication Date: 2019-03-08
浙江英德赛半导体材料股份有限公司
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

The air contains a variety of gas components. If the high-purity gas is exposed to the air, it will cause product contamination and detection failure.
In addition, air or other substances mixed in the analysis system will also cause product contamination, resulting in detection failure
Therefore, there is currently a lack of a complete analysis system to ensure the accuracy and accuracy of the analysis process while improving the analysis efficiency of the analysis process

Method used

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  • High-purity ammonia product detection system and detection method thereof

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Embodiment Construction

[0023] Such as figure 1 As shown, the technical solution of the present invention is a high-purity ammonia product detection system, which includes product gas pipeline 2, analysis bypass pipeline one 10, analysis bypass pipeline two 9, nitrogen pipeline 5, tail gas pipeline one 4, tail gas pipeline 26. Vacuum pipeline 3, intake main pipe 19, moisture detector 18, gas chromatograph 23, it is characterized in that product gas pipeline 2, vacuum pipeline 3 are connected with one end of intake main pipe 19, and the other end of intake main pipe 19 has a branch pipe One 25 and branch pipe two 21, the moisture detector 18 is connected to the branch pipe one 25, the gas chromatograph 23 is connected to the branch pipe two 21, the branch pipe one 25 is provided with a hand valve one 24, a pressure regulating valve one 26, and the branch pipe two 21 Hand valve two 20 and pressure regulating valve two 22 are provided, the nitrogen pipeline 5 is connected to the branch pipe one 25, the ...

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Abstract

The invention provides a high-purity ammonia product detection system. A product gas pipeline and a vacuum pipeline are connected with one end of a gas inlet general pipe; a branch pipe I and a branchpipe II are arranged at the other end of the gas inlet general pipe; a moisture detector is connected onto the branch pipe I; a gas chromatograph is connected onto the branch pipe II; the branch pipeI is provided with a hand valve I and a pressure regulating valve I; the branch pipe II is provided with a hand valve II and a pressure regulating valve II; a nitrogen gas pipeline is connected ontothe branch pipe I; a vacuum pump is arranged at an outlet end of the moisture detector; the vacuum pump is connected with a tail gas pipeline II; one end of an analysis bypath pipeline I is connectedwith the other end of a gas inlet end of the moisture detector and the tail gas pipeline II; a gas inlet at one side of the gas chromatograph is connected with a helium gas pipeline; the gas chromatograph is provided with a tail gas pipeline III; a head end of an analysis bypath pipeline II is connected with the branch pipe II and a tail end of the analysis bypath pipeline II is connected with a tail gas pipeline II. In a product gas analysis process, sampling is not needed; product gas only needs to be conveyed into the system through a pipeline, pipeline pollution is avoided in an operationprocess, the operation is simple and the quality of products is ensured.

Description

technical field [0001] The invention belongs to the technical field of gas detection, and in particular relates to a high-purity ammonia product detection system and a detection method thereof. Background technique [0002] The application fields of high-purity gas are extremely wide. In recent years, the use of high-purity ammonia gas (purity 99.99999%) is extremely wide, and it is widely used in LED, solar energy, photovoltaic and other industries. The impurities of high-purity gas directly affect the quality of products. In order to strengthen the quality control of products, higher requirements must be put forward for product detection systems and detection methods. The air contains a variety of gas components. If the high-purity gas is exposed to the air, it will cause product contamination and detection failure. In addition, air or other substances mixed into the analysis system will also cause product contamination, resulting in detection failure. Therefore, there i...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01N33/00
CPCG01N33/0032G01N33/0054
Inventor 赵晓兰卢勇华潘佳伟
Owner 浙江英德赛半导体材料股份有限公司
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