gas delivery device
A conveying device and gas technology, which is applied in the direction of liquid variable displacement machinery, machines/engines, pumps with flexible working elements, etc., which can solve the problems of insufficient flow, control of dimensional accuracy, and small volume
Active Publication Date: 2021-02-23
MICROJET TECH
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Problems solved by technology
[0007] The main purpose of this case is to provide a gas delivery device, which is an integrated miniaturized gas delivery device manufactured by micro-electromechanical process, so as to overcome the problems of small size, miniaturization, dimensional accuracy control and insufficient flow of traditional delivery devices. question
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[0018] Some typical embodiments embodying the features and advantages of the present application will be described in detail in the description in the following paragraphs. It should be understood that this case can have various changes in different aspects, all of which do not depart from the scope of this case, and the descriptions and diagrams therein are used as illustrations in nature, rather than construed to limit this case.
[0019] The gas delivery device in this case is an integrated miniaturized gas delivery device manufactured by micro-electromechanical process to overcome the problems of small size, miniaturization, insufficient output flow and poor control of dimensional accuracy of traditional gas delivery devices. First, see figure 1 , figure 2 and Figure 3A , in the first embodiment, the gas delivery device 1 is composed of a plurality of flow guide units 10 arranged in a specific arrangement, and in this embodiment, the plurality of flow guide units 10 ar...
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The invention provides a gas conveying device. The gas conveying device is composed of at least one flow guide unit, at least one flow guide unit comprises an inlet plate, a base material, a resonanceplate, an actuating film, a piezoelectric element and an outlet plate, wherein the inlet plate, the base material, the resonance plate, the actuating film and the outlet plate are sequentially stacked, a first cavity is defined between the resonance plate and the actuating film, a second cavity is defined between the actuating film and the outlet plate, when the piezoelectric element drives the actuating film, gas enters a conflux cavity of the base material through an inlet hole of the inlet plate, flows through a hollow hole of the resonance plate, enters the first cavity, is guided into the second cavity through a gap of the actuating film, and finally is guided out through an outlet hole of the outlet plate, so that circulation of the gas is controlled.
Description
【Technical field】 [0001] This case is about a gas delivery device, especially a miniature, thin and silent gas delivery device. 【Background technique】 [0002] At present, in various fields, whether it is medicine, computer technology, printing, energy and other industries, products are developing in the direction of refinement and miniaturization. Among them, the gas delivery structure included in the micro pump is the key technology. Therefore, how to use innovation The structure breaks through its technical bottleneck, which is an important content for development. [0003] With the rapid development of science and technology, the application of gas delivery devices is becoming more and more diversified, such as industrial applications, biomedical applications, medical care, electronic heat dissipation, etc., and even the recent popular wearable devices can be seen. It can be seen that Traditional gas delivery devices have gradually tended to miniaturize the device and m...
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IPC IPC(8): F04B43/04
CPCF04B43/046
Inventor 莫皓然黄启峰李伟铭戴贤忠韩永隆
Owner MICROJET TECH