High-precision linear displacement measuring device for actuator, adjustment and correction method, and measuring method

Abstract

The invention discloses a high-precision linear displacement measuring device for an actuator, an adjustment and correction method, and a measuring method. The high-precision linear displacement measuring device for the actuator comprises an arranged actuator, an actuator bracket, an anti-rotation mechanism, a position adjustment mechanism, an angle adjustment mechanism and a center adjustment rod, a magnetic ring of the position adjustment mechanism and a sensor of the angle adjustment mechanism constitute a magnetostrictive displacement sensor together, a side measuring method is adopted, two axisymmetric gaps in an annular clearance hole formed between the magnetic ring in the position adjustment mechanism and a measuring rod in the angle adjustment mechanism are measured by the centeradjustment rod, and the adjustment and correction directions of the measuring rod and the magnetic ring can be determined; and the stroke range of the actuator is adjusted for multiple times in a reciprocating manner, so that the measuring rod and a moving shaft are paralleled within the stroke range of the actuator. The high-precision linear displacement measuring device for the actuator is simple to install, is easy to implement, and has high measurement accuracy.

Description

technical field [0001] The invention belongs to the field of measurement, and relates to a high-precision linear displacement measuring device and a calibration and measuring method for an actuator. Background technique [0002] High-precision straight-stroke adjustable actuators have high requirements for the measurement of linear displacement. Due to the influence of factors such as application environment, installation form, and stroke restrictions, it is difficult to measure and calibrate the accuracy of the finished product, especially the load equipment of the actuator. After the installation is completed, the measurement is difficult, and it is easy to cause abnormal phenomena such as large measurement data errors or unstable data. [0003] For the precision measurement of the finished actuator, there are two types of displacement sensor installations: coaxial and sideways. Coaxial installation can only install the displacement sensor on the extension line of the mot...

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Problems solved by technology

[0004] In view of the problems existing in the prior art, the purpose of the present invention is to provide a high-precision linear displacement measuring device and a calibration measurement method for the actuator, which can effectively solve the problem that the measuring rod is not parallel to the motion axis and that the measuring rod cannot be kept constant within the stroke range. The problem of being in the center of the magnetic circle

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