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Metal recovery system used after stripping process

A recovery system and stripping process technology, which is applied to the improvement of process efficiency, electrical components, circuits, etc., can solve the problems of multi-metal impurities in chemical liquid, low metal recovery rate, and loss of precious metals, etc., so as to improve recovery rate and facilitate Mounting and dismounting, the effect of reducing the frequency of replacement

Pending Publication Date: 2020-01-31
SHENYANG KINGSEMI CO LTD
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  • Abstract
  • Description
  • Claims
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Problems solved by technology

[0003] In view of the above problems, the purpose of the present invention is to provide a metal recovery system after the stripping process, to solve the problem that the metal recovery rate of the existing recovery method is generally not high, and the used chemical liquid contains more metal impurities, and the waste liquid is difficult to recover. processing, and lost a large amount of precious metals

Method used

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  • Metal recovery system used after stripping process
  • Metal recovery system used after stripping process
  • Metal recovery system used after stripping process

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Embodiment Construction

[0023] In order to make the object, technical solution and advantages of the present invention clearer, the present invention will be described in detail below in conjunction with the accompanying drawings and specific embodiments.

[0024] Such as figure 1 As shown, a metal recovery system after the stripping process provided by the present invention includes a unit cavity 8, a primary filter device 1, a secondary filter device 2 and a liquid supply system, wherein the primary filter device 1 is arranged in the unit cavity 8 On the bottom plate 13 of the cavity, the primary filter device 1 is connected to the secondary filter device 2 through pipelines, and the secondary filter device 2 is connected to the unit cavity 8 through the liquid supply system to form a circulating liquid supply system.

[0025] Such as figure 2 As shown, the primary filter device 1 includes a filter upper cover 11, a filter screen 12 and a connecting assembly, wherein the filter screen 12 is arran...

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Abstract

The invention belongs to the technical field of wafer stripping, in particular to a metal recovery system used after a stripping process. The metal recovery system comprises a unit cavity, a primary filtering device, a secondary filtering device and a liquid supplying system, wherein the primary filtering device is arranged on a cavity bottom plate of the unit cavity, and is connected with the secondary filtering device through a pipeline, and the secondary filtering device is connected with the unit cavity through the liquid supplying system to form a circulated liquid supplying system. The metal recovery system greatly increases the metal recovery rate after the stripping process, and by the recycling of liquid medicines, a large amount of chemical liquids used in the stripping process are saved, the cost is reduced, resource waste is reduced, and the purpose of reducing the cost is achieved.

Description

technical field [0001] The invention belongs to the technical field of wafer stripping technology, in particular to a metal recovery system after the stripping technology. Background technique [0002] In the LED industry, wafer processing is divided into several steps, among which the lift-off process is a method of creating a structure (patterning) of a target material on the surface of a substrate (eg, a wafer) using a sacrificial material (eg, photoresist). When the sacrificial layer (photoresist in solvent) is washed off, the material on top is stripped and washed with the underlying sacrificial layer. This process usually uses high temperature and high , silver, etc.), and these precious metals need to be recycled and reused. The metal recovery rate of the existing recovery methods is generally not high, and the used chemical liquid contains more metal impurities, the waste liquid is difficult to handle, and a large amount of precious metals are lost. Therefore, how ...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C22B7/00H01L21/02
CPCC22B7/005H01L21/0272Y02P10/20
Inventor 刘忠贺王一
Owner SHENYANG KINGSEMI CO LTD
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