Measuring equipment for wave aberration of optical system based on acousto-optic modulator heterodyne interferometry

Abstract

The measurement equipment for wave aberration of optical system based on acousto-optic modulator heterodyne interferometry relates to the field of optical inspection and measurement technology, and solves the existing problems of difficulty in installation and adjustment, high cost and low measurement accuracy. The device includes the first laser, optical fiber beam splitter, first fiber acousto-optic modulator, second fiber acousto-optic modulator, first fiber collimator, second fiber collimator, first beam splitter, first beam combiner, point detector, The first polarization adjustment system, the second beam combiner, the second beam splitter, the second polarization adjustment system, the first area array detector; the optical system to be measured is arranged in the first polarization adjustment system. The present invention utilizes the optical fiber beam splitter, the first optical fiber acousto-optic modulator and the second optical fiber acousto-optic modulator to realize low installation and adjustment cost, high installation and adjustment accuracy, overcome the problem of too high fundamental frequency of a single acousto-optic modulator, and overcome the The measurement error introduced by the single acousto-optic modulator improves the measurement accuracy.

Description

technical field [0001] The invention relates to the technical field of optical inspection and measurement, in particular to a measurement device for measuring the wave aberration of an optical system based on an acousto-optic modulator heterodyne interferometry. Background technique [0002] The cutting-edge technology of space detection represented by space gravitational wave detection poses a great challenge to the accuracy requirements of long-baseline laser interferometry ranging. The optical system represented by the telescope is an important part of the long-baseline laser interferometric ranging system, and its system wave aberration is an important factor affecting the accuracy of interferometric ranging. [0003] At present, the wave aberration detection method of high-precision telescope system usually adopts phase shift interferometry, and the commonly used phase shift method is to push the mechanical phase shift of the reference mirror through the mechanical stru...

AI Technical Summary

Problems solved by technology

[0006] In order to solve the problems of the existing phase-shift interferometry equipment, such as difficult installation and adjustment, high cost, difficulty in improving the signal-to-noise ratio of the detector signal, and low measurement accuracy, the present invention provides a heterodyne interferometry optical system based on an acousto-optic modulator Measuring equipment for wave aberration

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