Measurement device for measuring wave aberration of optical system based on acousto-optic modulator heterodyne interference

Abstract

The invention discloses a measurement device for measuring wave aberration of an optical system based on acousto-optic modulator heterodyne interference, and relates to the technical field of opticalinspection and measurement. The problems that existing adjustment is difficult, high in cost and low in measurement precision are solved. The device comprises a first laser, an optical fiber beam splitter, a first optical fiber acousto-optic modulator, a second optical fiber acousto-optic modulator, a first optical fiber collimator, a second optical fiber collimator, a first beam splitter, a firstbeam combiner, a point detector, a first polarization adjustment system, a second beam combiner, a second beam splitter, a second polarization adjustment system and a first area array detector, wherein an optical system to be measured is arranged in the first polarization adjustment system. According to the measurement device, by means of the optical fiber beam splitter, the first optical fiber acousto-optic modulator and the second optical fiber acousto-optic modulator, the adjustment cost is low, the adjustment precision is high, the problem that the fundamental frequency of a single acousto-optic modulator is too high is solved, measurement errors introduced by the single acousto-optic modulator are overcome, and the measurement precision is improved.

Description

technical field [0001] The invention relates to the technical field of optical inspection and measurement, in particular to a measurement device for measuring the wave aberration of an optical system based on an acousto-optic modulator heterodyne interferometry. Background technique [0002] The cutting-edge technology of space detection represented by space gravitational wave detection poses a great challenge to the accuracy requirements of long-baseline laser interferometry ranging. The optical system represented by the telescope is an important part of the long-baseline laser interferometric ranging system, and its system wave aberration is an important factor affecting the accuracy of interferometric ranging. [0003] At present, the wave aberration detection method of high-precision telescope system usually adopts phase shift interferometry, and the commonly used phase shift method is to push the mechanical phase shift of the reference mirror through the mechanical stru...

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Problems solved by technology

[0006] In order to solve the problems of the existing phase-shift interferometry equipment, such as difficult installation and adjustment, high cost, difficulty in improving the signal-to-noise ratio of the detector signal, and low measurement accuracy, the present invention provides a heterodyne interferometry optical system based on an acousto-optic modulator Measuring equipment for wave aberration

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