Sensing device and electronic cigarette

A technology for sensing devices and electronic cigarettes, which is applied in tobacco and other fields, can solve the problems of strong interdependence of air pressure sensors, high risk of electronic equipment failure, and increased cost of electronic equipment, which is conducive to miniaturization, performance improvement, and performance improvement Effect

Pending Publication Date: 2020-12-15
MEMSENSING MICROSYST SUZHOU CHINA
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

The use of two air pressure sensors will lead to an increase in the cost of electronic equipment; and the two air pressure sensors occupy a large area and affect the miniaturization design of the product; moreo

Method used

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  • Sensing device and electronic cigarette
  • Sensing device and electronic cigarette
  • Sensing device and electronic cigarette

Examples

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Example Embodiment

[0039]The present invention will be described in more detail with reference to the drawings. In each of the drawings, the same components are represented by similar reference numerals. For the sake of clarity, the various parts in the drawings are not drawn. In addition, certain well-known parts may not be shown. For simplicity, the semiconductor structure obtained after several steps can be described in one figure.

[0040] It will be appreciated that in describing the structure of the device, when a layer, a region known as another layer, another region when the "on" or "over" may mean directly on another layer above the region, or between it and the other layer or region also comprise other layers or regions. And, if the device is turned over, that one layer or region to another layer, another region "below" or "below."

[0041] If the purpose of describing directly on another layer of the above situation area, will be used herein "...... directly above the" way of expression, ...

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PUM

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Abstract

The invention discloses a sensing device and an electronic cigarette. The sensing device is used for detecting internal airflow of an airflow channel and comprises a micro-electro-mechanical structure, wherein the micro-electro-mechanical structure comprises a vibrating membrane and a back plate; the back plate is opposite to the vibrating membrane to form a capacitor; the back plate is provided with at least one through hole; a gap is formed between the back plate and the vibrating membrane; a first surface of the vibrating membrane communicates with the inside of the airflow channel; a second surface of the vibrating membrane communicates with the outside atmosphere through the gap; the vibrating membrane prevents the inside of the airflow channel from communicating with the gap and deforms under the action of air pressure difference between the first surface and the second surface; and capacitance change of the capacitor at least represents the flow speed of air in the airflow channel.

Description

technical field [0001] The present application relates to the field of semiconductor device manufacturing, and more specifically, to sensing devices and electronic cigarettes. Background technique [0002] E-cigarettes are electronic products that mimic cigarettes and have the same look, smoke, taste and feel as cigarettes. It is a product that allows users to inhale after turning nicotine, etc. into steam by means of atomization. Among them, the electronic cigarette sensor is a key component of the electronic cigarette, and its function is to detect the user's smoking action. [0003] At present, there are two types of sensing methods for e-cigarette sensors that are popular on the market: capacitive microphone sensing and dual pressure sensor sensing. A condenser microphone is an energy conversion device that converts sound signals into electrical signals, and an electret microphone is usually used to achieve sound-to-electricity conversion. When the user smokes, the ca...

Claims

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Application Information

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IPC IPC(8): A24F40/51A24F40/50A24F40/40
CPCA24F40/40A24F40/50A24F40/51
Inventor 吕萍李刚
Owner MEMSENSING MICROSYST SUZHOU CHINA
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