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Coating device and bearing seat thereof

A technology of coating device and bearing seat, which is used in gaseous chemical plating, metal material coating process, coating and other directions

Active Publication Date: 2021-05-28
PIOTECH CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Furthermore, due to the increase in the space of the cavity, the control of the cavity temperature, such as temperature distribution uniformity and heat dissipation speed, etc., has also become a challenge

Method used

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  • Coating device and bearing seat thereof
  • Coating device and bearing seat thereof
  • Coating device and bearing seat thereof

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Embodiment Construction

[0023] In the following detailed description of a number of exemplary embodiments, reference is made to the accompanying drawings, which form a part hereof. It is shown by way of illustration by way of example by which the described embodiments can be practiced. Sufficient detail is provided to enable those skilled in the art to practice the described embodiments, but it is understood that other embodiments may be utilized, and other changes may be made, without departing from the spirit or scope thereof. Furthermore, while this may be true, references to "an embodiment" do not necessarily pertain to that same or singular embodiment. Therefore, the following detailed description is not intended to be limiting, and the scope of the described embodiments is defined only by the appended claims.

[0024] Within the scope of the specification and claims, unless the context clearly states otherwise, the following words and expressions have the meanings clearly associated therewith....

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Abstract

The invention discloses a coating device which comprises a first shell and a second shell. The first shell is provided with a top and a side. The second shell is contained in the first shell and at least partially spreads and extends downwards from the top of the first shell, a first space is defined between the first shell and the second shell, the second shell defines a second space, the first space surrounds the second space, and the first space does not communicate with the second space.

Description

technical field [0001] The invention relates to a coating device, in particular to a vapor deposition device suitable for three-dimensional samples. Background technique [0002] Vapor deposition processing equipment, especially for forming thin films (such as atomic deposition layers, ALD) on bulk objects (such as lenses), usually faces some problems, such as the formation of undesired thin films on the back of bulk objects, which The reason is that the non-deposited back of the block is not necessarily flat, so a gap is formed between the block and a bearing surface, causing the deposition gas to flow through the back of the block through the gap. In addition, since the block has a certain volume, the required processing chamber must also have a considerable space to accommodate the block, so the ability to clean the chamber also needs to be improved. Furthermore, due to the increase in the space of the cavity, the control of the cavity temperature, such as the uniformity...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C23C16/455C23C16/458C23C16/52C23C16/44
CPCC23C16/45544C23C16/4581C23C16/4401C23C16/52C23C16/4583C23C16/4412C23C16/45563C23C16/4586C23C16/4409C23C16/45521C23C16/455
Inventor 郭月刘春刘子优王卓李景舒
Owner PIOTECH CO LTD