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Piezoelectric Element And Liquid Droplet Ejection Head

A technology of piezoelectric elements and piezoelectric layers, applied in electrical elements, piezoelectric/electrostrictive/magnetostrictive devices, circuits, etc.

Active Publication Date: 2021-09-28
SEIKO EPSON CORP
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

In addition, in the case where the piezoelectric layer has a planar portion parallel to the substrate and an inclined surface portion inclined relative to the substrate, the above-mentioned problems tend to occur particularly in the inclined surface portion.

Method used

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  • Piezoelectric Element And Liquid Droplet Ejection Head
  • Piezoelectric Element And Liquid Droplet Ejection Head
  • Piezoelectric Element And Liquid Droplet Ejection Head

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0032] recording device

[0033] First, refer to figure 1 , the recording device 1 of the first embodiment including the liquid ejection head 100 as an example of the present invention will be described. figure 1 The recording device 1 shown is provided with a liquid ejection head 100 that ejects ink while reciprocating in a reciprocating direction B along the Y-axis direction, and the medium P is moved along the direction B of the liquid ejection head 100 . An image is formed on the medium P by moving in the conveyance direction A in the X-axis direction. However, the recording device including the liquid ejection head 100 of the present invention is not limited to the recording device having such a configuration. It is only necessary to move the medium P and the liquid ejection head 100 relatively to form an image on the medium P. In addition, as the medium P, instead of a single-sheet medium such as a sheet of paper, a long medium such as a roll paper may be used as the ...

Embodiment 2

[0066] In the following, refer to Figure 6 , the recording device of the second embodiment will be described. in addition, Figure 6 For the same as in the recording device 1 of embodiment 1 Figure 5 corresponding figure, and in Figure 6 In FIG. 2 , the same components as those in the first embodiment are denoted by the same reference numerals, and detailed description thereof will be omitted. Here, the recording device of this embodiment has the same features as the recording device 1 of the first embodiment described above, and has the same configuration as the recording device 1 of the first embodiment except for the points described below. Specifically, the piezoelectric element 300 has the same configuration as that of the recording device 1 of the first embodiment except for the configuration of the second piezoelectric layer 172 . Therefore, the utilization in the recording device 1 of the first embodiment Figure 1 to Figure 4 The descriptions of the above are ...

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PUM

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Abstract

The invention provides a piezoelectric element and a liquid droplet ejection head which can appropriately fill holes in the surface of a piezoelectric body layer. The piezoelectric element (300) is provided with: a substrate (110); a first electrode (160) formed on a first substrate surface (110a) in a first direction of the substrate (110); a first piezoelectric layer (171) that is formed on the first electrode (160) and that has a flat surface portion (170b) along the first substrate surface (110a) and an inclined surface portion (170a) inclined with respect to the flat surface portion (170b); a second piezoelectric layer (172) that is formed on the inclined surface portion (170a) and that is thinner than the thickness (L1) of the flat surface portion (170b) of the first piezoelectric layer (171); and a second electrode (180) formed at least on the planar portion (170b).

Description

technical field [0001] The present invention relates to a piezoelectric element and a droplet ejection head. Background technique [0002] Conventionally, a piezoelectric element including a substrate, a piezoelectric layer, and an electrode capable of applying a voltage to the piezoelectric layer has been used. As an example of such a piezoelectric element, for example, Patent Document 1 discloses a piezoelectric element including: a substrate; a first electrode; and a piezoelectric layer formed on the first electrode. above; a second electrode formed on the piezoelectric body layer. [0003] However, in a conventional piezoelectric element including a substrate, a piezoelectric layer, and electrodes, cavities may be generated on the surface of the piezoelectric layer, and foreign substances such as water may enter the cavities. When foreign matter such as water enters the voids on the surface of the piezoelectric layer during manufacture of the piezoelectric element, lea...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): B41J2/14B41J2/16
CPCB41J2/14201B41J2/16B41J2/14233B41J2002/14241B41J2002/14491B41J2002/14419H10N30/8548H10N30/2047H10N30/708B41J2002/14258H10N30/50H10N30/8554
Inventor 板山泰裕
Owner SEIKO EPSON CORP