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Process for preparing nanometer metallic particles dispersion oxide optical thin film

A technology of nano metal particles and metal particles, applied in optics, optical components, metal material coating process, etc., can solve the problems of difficult to control the concentration of metal particles, difficult to improve and control the composition of metal dispersed particles, etc., to achieve excellent nonlinear Effects of Features

Inactive Publication Date: 2005-06-29
UNIV OF SCI & TECH BEIJING
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  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

It is difficult to improve and control the composition of metal dispersed particles by melting quenching method, ion implantation method, sol-gel method
Using single-target sputtering, it is also difficult to control the concentration of metal particles due to the large difference in the deposition rates of metals and oxides

Method used

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  • Process for preparing nanometer metallic particles dispersion oxide optical thin film
  • Process for preparing nanometer metallic particles dispersion oxide optical thin film
  • Process for preparing nanometer metallic particles dispersion oxide optical thin film

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Embodiment Construction

[0011] Au / SiO of the present invention 2 The nanometer metal particle dispersed oxide multilayer film of the system is composed of several or even hundreds of layers of nanometer metal particle layers and oxides. The diameter of the nanometer metal particles is 2 to 50 nm, and the thickness of the oxide layer is several nanometers to tens of nanometers. figure 2 Represents the nanolayered morphology of 11-layer films (nano-Au layer and SiO 2 Layers are 11 layers) cross-sectional transmission electron micrographs. Such as figure 2 As shown in a, the nano-metal particle layer is completely parallel and evenly spaced in a large area, and the thickness of the entire film is 150nm. from figure 2 b We can observe that Au and SiO 2 nanolayer structure, where SiO 2 The thickness of the layer is 10 nm and the diameter of the gold particles is 6-8 nm. The thin film is prepared by ion sputtering technology.

[0012] Its specific technological process is:

[0013] 1. Au and SiO...

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Abstract

A method of preparing nonlinear optical film of nanometer-grade metal particles dispersed in oxides, which is characterized in, installing metal sputtering plate and oxide sputtering plate in ion sputtering device, baffles before each sputtering plate and base plate, controlling the sedimentation speed of metal and oxide, so controlling precisely the particles, dispersing state, thickness of film. It comprises the steps: preparing a monolayer film of nanometer-grade metal particles, a monolayer film of oxide particles, sedimentating the two member alternately, preparing stratified film; in sedimentating, dispersing uniformly metal particles with the size of 2í½50nm into the oxide matrix. The nanometer-grade metal particles are Auú¼Ag or Cu. The oxides are SiO2ú¼TiO2ú¼BaTiO2. The stratified film has absorbing peaks in special wave lengths.

Description

Technical field: [0001] The invention belongs to the field of composite materials of nanometer metal particles and inorganic non-metallic materials, in particular, it provides the design and preparation process of nanometer metal particles dispersed oxide multilayer nonlinear optical film, and relates to a kind of nanometer metal particles (mainly Au, Ag , Cu, etc.) dispersed oxide (SiO 2 ,TiO 2 , BaTiO 2 Mainly) the design and preparation process of multilayer nonlinear optical thin film materials. Background technique: [0002] Nano-metal particles dispersed oxide film, due to the surface effect and quantum size effect of metal nanoparticles are very significant, surface plasmon resonance occurs under the interaction of electrons and light near the surface of nano-metal particles, and selectively absorbs and transmits incident light waves. Pass. Functional thin films with such nonlinear optical properties have broad application prospects in the field of optical communi...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): C23C14/34C23C14/46G02B1/10
Inventor 张波萍
Owner UNIV OF SCI & TECH BEIJING
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