Optical thin-membrane production method of dispersion oxide from copper-silver nanometer particle
A technology of oxide films and nanoparticles, which is applied in the field of composite materials of metal nanoparticles and inorganic non-metallic materials, can solve the problem of no layered structure and achieve the effect of excellent nonlinear characteristics
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[0012] Cu of the present invention x Ag 1-x / SiO 2 The copper-silver nanoparticle-dispersed oxide multilayer film of the system is composed of several layers or even hundreds of layers of copper-silver nano-metal particle layers and oxides. The diameter of copper-silver nanoparticles is 2-100 nanometers, and the thickness of the oxide layer is several nanometers. to tens of nanometers. figure 1 Schematic diagram of the nano-metal particle dispersed oxide multilayer film designed for the present invention. Wedge 1 is the substrate, wedges 2 and 3 are Cu or Ag nanoparticle layers, respectively, and wedge 4 is the oxide layer. The thin film is prepared by sputtering technique.
[0013] Its specific technological process is:
[0014] 1. Cu, Ag and SiO 2 The sputtering target has a diameter of 50mm and a purity of 99.99%.
[0015] 2. Clean the quartz substrate ultrasonically in acetone for 5-10 minutes, and then put it into the sputtering chamber.
[0016] 3. The substrate ...
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