Semiconductor laser V shaped groove fixed optical fiber coaxial device
A fiber coaxial and laser technology, which is applied to semiconductor lasers, laser parts, lasers, etc., can solve the problems of reducing the cost of semiconductor laser coaxial devices and affecting the wide application, and achieve the effect of reducing production costs and improving production efficiency.
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[0015] see figure 1 and figure 2 ,exist figure 1 and figure 2 In the embodiment, the high mesa 1 of the heat sink, the low mesa 2 of the heat sink and the V-shaped groove 3 are respectively made on the silicon heat sink 9 by combining dry etching and wet etching micromachining techniques. Then use microelectronic technology to make planar electrodes 4 and alignment marks 5 on the lower mesa 2 of the heat sink, and make a back gold layer on the back of the silicon heat sink 9 . In this process, it is easy to ensure strict alignment with the centerlines of the V-shaped groove 3 and the alignment mark 5 by utilizing the precision of the micromachining technology and the microelectronics process. The waveguide and cleavage plane of the semiconductor laser 7 are aligned with the corresponding marks of the alignment mark 5 and welded on the plane electrode 4 . The head of the optical fiber 6 is shaped into a conical shape by grinding or high-temperature drawing, which can incr...
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