Method of repairing micromirrors in spatial light modulators

Inactive Publication Date: 2006-08-31
VENTURE LENDING & LEASING IV +1
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

A major factor that limits the reliability and widespread use of micromirror devices is adhesion.
When mechanical restoring forces cannot overcome adhesive forces, the micromirror devices are said to suffer from stiction.
For the case of in-use stiction, each time one part of the micromirror (e.g. mirror plate of a micromirror device) touches the other (e.g. stopping mechanism) or the substrate, the contact force grows and ultimately becomes too large for the restoring force to overcome.

Method used

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  • Method of repairing micromirrors in spatial light modulators
  • Method of repairing micromirrors in spatial light modulators
  • Method of repairing micromirrors in spatial light modulators

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Embodiment Construction

[0033] In order to repair the stuck micromirrors, refresh pulses are applied to the micromirrors so as to produce additional mechanical restoration forces in the micromirrors. The additional mechanical restoration force is added to the restoration force in the micromirrors so as to enhance the restoration force.

[0034] In the instance of operating an array of micromirrors, reparation procedures are initiated according to a predetermined schedule. In each reparation procedure, voltages of the micromirrors of the array are set to values such that the micromirrors are expected to be at the OFF state. Refresh voltage pulses are then applied to the micromirrors of the array. In the presence and after the application of the refresh voltage pulse, the micromirrors at the OFF state are not affected, and maintain their positions at the OFF state. However, the stuck micromirrors due to the in-site stiction are further deflected so as to produce additional deformation, under which additional m...

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Abstract

Disclosed herein is method of operating a device that comprises an array of micromirrors. The method comprises a process usable for repairing stuck micromirrors of the micromirror array during the operation. The reparation process applies, at the ON state, two consecutive refresh voltages to the mirror plates of the micromirrors in the array with the pulses being separated in time longer than the characteristic oscillation time of the micromirrors. The reparation process can be applied independently to the micromirrors. Alternatively, the reparation process can be incorporated with a bias inversion process.

Description

TECHNICAL FIELD OF THE INVENTION [0001] The present invention is related generally to the art of spatial light modulators having micromirror arrays, and more particularly, to a method and an apparatus for operating the micromirror array of the spatial light modulator in producing videos. BACKGROUND OF THE INVENTION [0002] Microstructures, such as micromirror devices, have found many applications in basic signal transduction. For example, a spatial light modulator based on micromirror device steers light in response to electrical or optical signals. Such a modulator can be a part of a communication device or an information display. [0003] A major factor that limits the reliability and widespread use of micromirror devices is adhesion. Adhesion is a result of the dominance of surface and interfacial forces, such as capillary, chemical bonding, electrostatic, and van der Waals forces, over mechanical forces which tend to separate micromirror device components. When mechanical restoring...

Claims

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Application Information

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IPC IPC(8): G02B26/00
CPCG02B26/0841
InventorPATEL, SATYADEVDUNPHY, JAMESRICHARDS, PETERCOMBES, MICHEL
OwnerVENTURE LENDING & LEASING IV