Piezoelectric vibration gyro element, method for manufacturing the same, and piezoelectric vibration gyro sensor
A piezoelectric vibrating gyroscope, a technology for a manufacturing method, applied in the directions of piezoelectric devices/electrostrictive devices, manufacturing/assembly of piezoelectric/electrostrictive devices, components of piezoelectric devices or electrostrictive devices, etc., It can solve the problems of reducing the productivity and yield, forming the correct pattern of the photoresist film 16, and prolonging the exposure time of the irradiation light, so as to achieve the effect of correct electrode segmentation.
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[0049] Hereinafter, best embodiments of the present invention will be described in detail with reference to the drawings.
[0050] FIG. 1 schematically shows a piezoelectric vibrating gyro element 21 of the present invention. The piezoelectric vibrating gyro element 21 has a pair of detection and vibrating arms 23 , 23 extending from the center of the upper and lower sides of the substantially square central support portion 22 to both upper and lower sides, respectively, as a detection vibration system. In addition, the piezoelectric vibrating gyro element 21 has, as a drive vibration system, a pair of connecting arms 24a, 24b extending from the center of the left and right sides of the central support part 22 to the left and right sides and in a direction perpendicular to the detection vibrating arm. and a pair of left and right driving vibrating arms 26a, 26a, 26b extending up and down on both sides in a direction perpendicular to the connecting arms and in parallel with the...
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