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42 results about "Symmetric property" patented technology

On-line detection device of wave aberration of projection lens of lithography machine with precision calibration function

The invention relates to an on-line detection device of wave aberration of a projection lens of a lithography machine with precision calibration function, which belongs to the field of optical detection. The on-line detection device additionally introduces a grating and two circular holes in a PSPDI by utilizing the property that the system error of the PSPDI rotates along with the beam splitting direction of the grating, the two gratings and the three circular holes are taken as measurement precision calibration elements together, and the system error during the calibration of the measurement precision of the PSPDI is separated according to the orthogonal property and the odd-even symmetry property of a Zernike polynomial in the unit circular region, thereby obtaining the wave surface error of a spherical reference wave produced by diffraction of the circular holes for calibration and characterization of the measurement precision of the PSPDI and leading the on-line detection device of the projection lens of the lithography machine to have the capability of realizing the on-line detection of the wave aberration and also have the measurement precision calibration function.
Owner:BEIJING INSTITUTE OF TECHNOLOGYGY

Method of quickly calculating far-field radiation field of large-scale MIMO array based on symmetric property

The invention belongs to the field of electromagnetic numerical calculation, and specifically relates to a precise and quick calculation method of calculating the far-field radiation field of a large-scale MIMO array antenna based on the symmetric property of arrays. The method comprises the following steps: S1, determining the structure and parameters of an M*N planar array antenna; S2, determining the size and extraction mode of the sub-matrixes in a large array; S3, approximately calculating out the active unit pattern of each array element of the large array based on an extracted sub-matrix active unit pattern and by making use of the symmetric property of a homogeneous planar array; and S4, calculating the properties of the radiation field of the large array through superimposed calculation. The method of the invention is based on extension of a small array to a large array, and is of high calculation speed. By using the superposition principle of field, the method is flexible in calculation, and has a wide scope of application. The method can be applied to both homogeneous linear and planar arrays. Through superimposed calculation, a large amount of matrix operation is avoided, the amount of calculation is reduced, and the calculation speed is improved.
Owner:THE PLA INFORMATION ENG UNIV

Graph state-based link chain structure quantum stabilizer subcode construction method

The invention discloses a graph state-based link chain structure quantum stabilizer subcode construction method which is different from a current popular method for constructing a stabilizer subcode through a graph state in ideas. According to the method, specific rotation symmetry of a structure of a graph state of quantum bit subcodes arranged in a link chain manner is adopted, a main part of a stabilizer is analytically constructed by establishing an entanglement relation of neighborhoods, then through calculating and analyzing, a missing part which does not meet an error correction condition is supplemented, and an error correction capability of the stabilizer is ensured by adding a stabilizer sub-operation operator, so that a complete stabilizer subcode is acquired. According to the method for constructing the quantum error-correcting code by establishing the entanglement relation of the neighborhoods through a topological structure and the specific symmetric property of the graph state, excellent promotion significance and application prospects are realized on two aspects of extending a higher dimensional quantum error-correcting code and exploring a new type of quantum error-correcting code.
Owner:易迅通科技有限公司

Piezoelectric vibration gyro element, method for manufacturing the same, and piezoelectric vibration gyro sensor

To ensure a symmetric property of bending vibrations for vibrating arms, and to accurately and easily divide electrodes, in a piezoelectric vibrating gyroscope element provided with a pair of vibrating arms for detection at the center thereof and connecting arms on both sides thereof, and a pair of vibrating arms for drive at their tip parts. Planar parts 28a and 28b, oriented perpendicular to the direction of extension of the vibrating arms 26a and 26b for drive, are provided to both sides of the side surfaces of extension parts 27a and 27b extending further along the direction of extension of the tip parts of the connecting arms 24a and 24b from them. Wiring 42 is formed, in such a way, as to traverse the tip faces of the extension parts in the direction of their thickness and connect the tip parts of the connecting arms to the main front and back surfaces of the extension parts. First electrodes 35 and 35 in the main front and back surfaces of the vibrating arms for drive are electrically connected to each other. In an exposure process for dividing electrodes, the main surfaces and the side surfaces are simultaneously exposed obliquely from above perpendicular to the plane parts of the extension parts and at some angle from the perpendicular direction with respect to the main surfaces of the vibrating arms for driving.
Owner:SEIKO EPSON CORP

On-line detection device with function of calibrating systematic error for wave aberration of projection objective of photoetching machine

The invention discloses an on-line detection device with the function of calibrating a systematic error for wave aberration of a projection objective of a photoetching machine, belonging to the field of optical detection. The device comprises an object space mask plate with circular holes, a phase-shifting device, a photoelectric sensor, a memorizer, a controller, an arithmetic unit, a beam splitting device and an image space mask plate, wherein the beam splitting device comprises two binary diffraction gratings: a first grating and a second grating; and the image space mask plate comprises awindow and a first circular hole and a second circular hole with equal diameters. The second grating of the beam splitting device and the second circular hole of the image space mask plate are used as elements for calibrating the systematic error, and the systematic error of the device is calibrated according to the orthogonal property and the odd-even symmetrical property of the Zernike multinomial in a unit circle. The device of the invention is integrated on a masking workpiece platform and a silicon slice workpiece platform of the photoetching machine, and compared with the prior art, thedevice can calibrate the systematic measurement error introduced by a measuring device, thereby increasing the accuracy of measurement.
Owner:BEIJING INSTITUTE OF TECHNOLOGYGY

OFDM transmitter for raising transfer rate and signal compressing method

An OFDM transmitter capable of improving a transmission rate of OFDM signals and a method for compressing signals thereof are provided to increase a transmission rate of whole data by reducing the length of one OFDM symbol. An inverse fourier transform unit(200) transforms OFDM(Orthogonal Frequency Division Multiplexing) signals of a frequency domain into OFDM signals of a time domain through inverse fourier transform. An even function extracting unit(210) extracts an even function signal symmetrical to a y axis from the OFDM signals of the time domain. An odd function extracting unit(230) extracts an odd function signal symmetrical to the origin from the OFDM signals of the time domain. The even function signal is formed of the sum of a first even function signal and a second even function signal. A first selecting unit(213) selects anyone of the first even function signal and the second even function signal. The odd function signal is formed of the sum of a first odd function signal and a second odd function signal. A second selecting unit(233) selects anyone of the first odd function signal and the second odd function signal. A first cutting unit(215) takes one half signal of the selected even function signal. A second cutting unit(235) takes one half signal of the selected odd function signal.
Owner:SAMSUNG ELECTRONICS CO LTD

Piezoelectric vibration gyro element, method for manufacturing the same, and piezoelectric vibration gyro sensor

To ensure a symmetric property of bending vibrations for vibrating arms, and to accurately and easily divide electrodes, in a piezoelectric vibrating gyroscope element provided with a pair of vibrating arms for detection at the center thereof and connecting arms on both sides thereof, and a pair of vibrating arms for drive at their tip parts. Planar parts 28a and 28b, oriented perpendicular to the direction of extension of the vibrating arms 26a and 26b for drive, are provided to both sides of the side surfaces of extension parts 27a and 27b extending further along the direction of extension of the tip parts of the connecting arms 24a and 24b from them. Wiring 42 is formed, in such a way, as to traverse the tip faces of the extension parts in the direction of their thickness and connect the tip parts of the connecting arms to the main front and back surfaces of the extension parts. First electrodes 35 and 35 in the main front and back surfaces of the vibrating arms for drive are electrically connected to each other. In an exposure process for dividing electrodes, the main surfaces and the side surfaces are simultaneously exposed obliquely from above perpendicular to the plane parts of the extension parts and at some angle from the perpendicular direction with respect to the main surfaces of the vibrating arms for driving.
Owner:SEIKO EPSON CORP

Boundary element analytic method and a boundary element analytic program

An object of the present invention is to provide a boundary element analytic method and a boundary element analytic program, which are capable of coping with the problem of diversity in symmetric property to be encountered when carrying out an analytic operation by taking advantage of the symmetric property of a subject to be analyzed, and thus providing an efficient analysis.
Various types of data for the use in the boundary element analysis, which have been previously input at step S101, are stored at step S102. To carry out this operation, at least boundary element definition information for defining a boundary element in the subject to be analyzed and state quantity information in which boundary element identification information for identifying the defined boundary element is associated with the boundary element for each state quantity thereof. At step 103, the input different types of data are used to generate a digitized boundary integral equation with a boundary value at a point of element on each defined boundary element taken as a variable. Then, at step S104, the generated boundary integral equation is assigned with the input boundary condition to sort out any unknowns, thus obtaining the simultaneous equations. The obtained simultaneous equations are then solved to determine respective values for the unknowns.
Owner:EBARA CORP +1

OFDM transmitter for raising transfer rate and signal compressing method

An OFDM transmitter capable of improving a transmission rate of OFDM signals and a method for compressing signals thereof are provided to increase a transmission rate of whole data by reducing the length of one OFDM symbol. An inverse fourier transform unit(200) transforms OFDM(Orthogonal Frequency Division Multiplexing) signals of a frequency domain into OFDM signals of a time domain through inverse fourier transform. An even function extracting unit(210) extracts an even function signal symmetrical to a y axis from the OFDM signals of the time domain. An odd function extracting unit(230) extracts an odd function signal symmetrical to the origin from the OFDM signals of the time domain. The even function signal is formed of the sum of a first even function signal and a second even function signal. A first selecting unit(213) selects anyone of the first even function signal and the second even function signal. The odd function signal is formed of the sum of a first odd function signal and a second odd function signal. A second selecting unit(233) selects anyone of the first odd function signal and the second odd function signal. A first cutting unit(215) takes one half signal of the selected even function signal. A second cutting unit(235) takes one half signal of the selected odd function signal.
Owner:SAMSUNG ELECTRONICS CO LTD
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