Optical film thickness monitoring system
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Patents(China)
- Current Assignee / Owner
- SHANGHAI INST OF OPTICS & FINE MECHANICS CHINESE ACAD OF SCI
- Publication Date
- 2008-01-30
- Estimated Expiration
- Not applicable · inactive patent
Smart Images
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Abstract
Description
technical field
[0001] The invention relates to film coating, in particular to an optical film thickness monitoring system for real-time monitoring of film thickness in the film coating process. Background technique
[0002] The optical film thickness monitoring system is an optical system that monitors the thickness of the film during the vacuum coating process. The existing system for monitoring the thickness of the optical film is a vertical transmission optical system (85101725, published on October 7, 1987). Figure 1 is its optical path As shown in the figure, a first-class double-aperture diaphragm 04 is placed behind the angle-variable filter 03 or the exit slit of the monochromator, and the common center line of the double holes passes through the rotation axis of the angle-variable filter 03 (optical axis) vertically. ). The reflective condenser 01 images the light source 02 on the equal double-aperture diaphragm 04, the measuring beam and the reference beam emerge...