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Micro-machined device structures having on and off-axis orientations

A technology of micro-mechanics and equipment, applied in the field of angular velocity and acceleration sensors, which can solve problems such as difficult to obtain alignment and width

Inactive Publication Date: 2008-03-12
ANALOG DEVICES INC
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Since the mask patterns used in building the functional elements of the sensor device are arranged according to the horizontal and vertical pitches of a rectilinear grid, it is difficult to obtain critical information about the functional sensor elements. Alignment and Width

Method used

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  • Micro-machined device structures having on and off-axis orientations
  • Micro-machined device structures having on and off-axis orientations
  • Micro-machined device structures having on and off-axis orientations

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Embodiment Construction

[0032] US Provisional Patent Application No. 60 / 466,082, filed April 28, 2003, entitled "MICRO-MACHINEDDEVICE STRUCTURES HAVING ON AND OFF-AXISORIENTATIONS," is hereby incorporated by reference.

[0033] A micromechanical multi-sensor is disclosed that provides 1 axis of acceleration sensing and 2 axes of angular velocity sensing in a single-sensor device. The presently disclosed multi-sensors are arranged symmetrically on the die, thereby improving yield as well as improving the overall performance of the multi-sensor device.

[0034] FIG. 1 depicts an exemplary embodiment of a micromechanical multi-sensor 100 in accordance with the present invention. In the illustrated embodiment, the multi-sensor 100 includes a pair of accelerometers 102 and 104 . The accelerometers 102 and 104 include blocks 103 and 105, respectively, wherein each block is substantially circular. It should be understood that blocks 103 and 105 may alternatively be substantially square, hexagonal, octagon...

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Abstract

The present invention provides a micro-machined multi-sensor that provides 1-axis of acceleration sensing and 2-axes of angular rate sensing. A method of fabricating the micro-machined multi-sensor includes depositing a layer of sacrificial material or structural material onto the substrate surface. The deposited layer of sacrificial or structural material is then masked with a predetermined mask pattern formed using a rectilinear grid having multiple horizontal and vertical spacings. The mask pattern defines the functional components of the sensor device. In the event the multi-sensor includes at least one functional component whose alignment on the substrate is critical to the optimal performance of the sensor, the critical component is defined so that its longitudinal axis is substantially parallel to the horizontal or vertical axis of the mask. In the event the multi-sensor includes at least one functional component whose alignment on the substrate surface is not critical to optimal sensor performance, the non-critical component may be defined so that its longitudinal axis is not parallel to the horizontal and vertical axes of the mask.

Description

[0001] CROSS-REFERENCE TO RELATED APPLICATIONS [0002] This application claims priority to US Provisional Patent Application No. 60 / 466,082, filed April 28, 2003, entitled "MICRO-MACHINEDDEVICE STRUCTURES HAVING ON AND OFF-AXISORIENTATIONS." [0003] Statement Regarding Federally Sponsored Research or Development [0004] N / A technical field [0005] The present invention relates generally to integrated angular velocity and acceleration sensors ("multisensors"), and more particularly to micromechanical multisensors capable of providing 1 axis of acceleration sensing and 2 axes of angular velocity sensing, and a method for fabricating such a multisensor technology. Background technique [0006] It is well known that micromachined multi-sensors include at least one accelerometer for providing indications of acceleration sensing and angular velocity sensing in single-sensor devices. As described in U.S. Patent No. 5,392,650, issued February 28, 1995, entitled "MICRO-MACHINE...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): H01L21/00
Inventor 约翰·A·吉恩
Owner ANALOG DEVICES INC