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High-temperature bake quartz boat

A high-temperature, wafer-based technology that can be used in packaging item types, special packaging items, lighting and heating equipment, etc., to solve problems such as wafer damage and damage to wafers

Inactive Publication Date: 2008-11-19
KING YUAN ELECTRONICS
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

And because the contact area of ​​cylindrical glass rod 150 and wafer is too small, when cylindrical glass rod 150 is in contact with wafer, it is difficult to reduce the buffer and make wafer easily have some damage or damage wafer at its edge.

Method used

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Embodiment Construction

[0032] Some embodiments of the invention are described in more detail herein, however, the invention may be implemented broadly in other embodiments and the scope of the invention is not limited by the scope of the filed patent application. The accompanying drawings described in the present invention are only examples, and there are various changes in these drawings in the spirit of the present invention, which should not be recognized as limited, and all changes are considered to be part of the patent scope of the application.

[0033] When a wafer has been tested, it must be placed in an oven to dry the ink, which is used to mark bad wafers. However, due to the turbulence in the middle of the transportation process, the wafer is likely to be damaged or cracked at the edge of the wafer due to collision with the wafer boat during the transportation process. Therefore, the present invention provides a high-temperature oven An improved structure of a wafer baking boat.

[0034]...

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PUM

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Abstract

The invention relates to a high-temperature baking crystal ship, which comprises a front element, two side wall plates, one back element, dual fixing grooves, two striking flake baffle plates, and two support rods. The invention can avoid damaging crystal most.

Description

technical field [0001] The present invention relates to a crystal boat, in particular to a high-temperature baked crystal boat. Background technique [0002] In the semiconductor manufacturing industry, manufacturing integrated circuit chips from wafers usually includes several steps of wafer processing, testing, storage and handling. Due to the fragile nature of the wafer and its precious price, it must be properly protected during the manufacturing process, and the purpose of the wafer boat is to provide this protection. [0003] In the high temperature baking process, the wafer boat made of metal can be used at a temperature higher than 300 degrees Celsius. However, during the baking process, when the wafer is transported, its edge collides with the wafer boat, which causes some damage to the edge of the wafer or breaks the wafer. [0004] Such as figure 1 A perspective view showing a wafer boat according to an embodiment of the prior art. A wafer boat 100 is used for ...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): H01L21/673F27D5/00B65D85/30
Inventor 戴碧辉
Owner KING YUAN ELECTRONICS