Method and device for preparing zinc oxide nano-crystal based on non ionization radiation

A technology of nanocrystals and infrared rays, applied in the field of ceramic materials, can solve problems such as difficult separation, difficult deposition of ZnO nanocrystals, and inability to form temperature gradients

Inactive Publication Date: 2009-01-07
JIANGSU UNIV
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Problems solved by technology

However, this method cannot form a certain temperature gradient because the target and the substrate are in the same furnace, which brings difficulties to the deposition of ZnO nanocrystals; there are many types of ZnO nanocrystals prepared by the coaxial oxygen laser in-situ method, and Keep the natural growth direction, but there are also shortcomings that are difficult to separate

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  • Method and device for preparing zinc oxide nano-crystal based on non ionization radiation

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Embodiment Construction

[0017] The details and working conditions of the specific device proposed by the present invention will be described in detail below in conjunction with the accompanying drawings.

[0018] Carrying out gas phase oxidation with the present invention prepares zinc oxide nano crystal device to comprise: O 2 Flow meter 1, Ar flow meter 2., workbench 3, metal zinc plate 4, K9 glass window 5, continuous laser, reaction furnace 7, heating furnace 8, base 9, base 10, vacuum pump 11.

[0019] Wherein the K9 glass window 5 is set on the top of the reaction furnace 7, and O is connected on the left side of the reaction furnace 7 2 The flowmeter 1 and the Ar flowmeter 2 are provided with a workbench 3 for placing a metal zinc plate 4 in the middle of the reaction furnace 7, a continuous laser is provided above the corresponding reaction furnace 7, and a A susceptor 10 on which a substrate 9 is placed, and a vacuum pump 11 is provided on the right side of the heating furnace 8 .

[0020]...

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Abstract

The present invention relates to a preparation method of zinc oxide nano crystal and its equipment. Said equipment includes O2 flow meter, Ar flow meter, reaction furnace, auxiliary heating furnace and light-conducting device mounted in its interior, working table, metal zinc plate, nonionizing radiation, base bottom, base seat and vacuum pump. Its preparation method includes the following steps: utilizing heat effect of nonionizing radiation of continuous laser and infrared ray, etc. to heat metal zinc plate to above vaporization temperature of metal zinc, and making metal zinc plate surface produce high-temperature plasma, making said plasma be orientationally locally expanded and reacted with oxygen gas in the reaction furnace, so that the several nano zinc oxide crystals whose specific forms and qualities are completely identical can be obtained.

Description

technical field [0001] The invention belongs to the technical field of ceramic materials, and relates to a method and a device for preparing zinc oxide nanocrystals, in particular to a method and a device for preparing zinc oxide nanocrystals based on continuous laser or infrared gas phase oxidation. Background technique [0002] The common zinc oxide nanocrystal preparation technology is to use physical vapor deposition (PVD), chemical vapor deposition (CVD), pulsed laser deposition (PLD) and other methods to increase the temperature of metal zinc powder to vaporize the zinc powder, and Gas O in the reaction tube (reaction furnace) 2 A reaction occurs, and then the temperature returns to room temperature after being kept for a period of time, and zinc oxide crystals are deposited on the substrate (such as a silicon wafer). [0003] The closest to the present invention is the preparation of zinc oxide nanocrystals by pulsed laser deposition (PLD) and coaxial oxygen laser in...

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): C01G9/02B82B3/00
Inventor 张永康鲁金忠周骏冯爱新孔德军任旭东
Owner JIANGSU UNIV
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