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Thermal movement sensor

A sensor and heater technology, applied in the direction of instruments, instrument parts, piezoelectric devices/electrostrictive devices, etc., can solve problems such as the impossibility of obtaining PES data

Inactive Publication Date: 2009-08-12
INT BUSINESS MASCH CORP
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, in some situations, such as when initially starting up the device or during the recovery of the device from mechanical vibration, it is not possible to obtain PES data

Method used

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  • Thermal movement sensor
  • Thermal movement sensor
  • Thermal movement sensor

Examples

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Embodiment Construction

[0041] First refer to figure 1 , in a preferred embodiment of the invention, a sensor 3 is provided for detecting the movement of an object 1 arranged to move in translation in any direction relative to the reference 2 in a plane along a movement axis 9 . The sensor 3 comprises a heater 4 facing the moving plane of the object 1 . The heater 4 has a temperature-dependent electrical resistance. The object 1 comprises a surface 6 with a first region 7 and a second region 8 . The thermal conductivity of the first region 7 is different from the thermal conductivity of the second region 8 . A boundary 5 separates the first area 7 from the second area 8 . The boundary 5 then acts as a dividing line between areas with greater and lesser thermal conductivity. In operation, as the object 1 moves along the axis of movement 9, the boundary 5 moves relative to the heater 4, producing a corresponding change in the heat loss of the heater 4 and a corresponding change in the resistance of...

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Abstract

A sensor for detecting movement of an object arranged to move in a plane, the sensor comprising: a heater facing the moving plane of the object and having a temperature-dependent electrical resistance; and a boundary defined in the object , between regions of different thermal conductivities; wherein, as the object moves, the boundary moves relative to the heater, producing a corresponding change in heater heat loss and a corresponding change in heater resistance.

Description

technical field [0001] The present invention generally relates to a transducer for detecting movement of an object, and more particularly to a transducer for detecting movement of an object in a Micro-Electro-Mechanical-System (MEMS) device. Background technique [0002] The local probe storage (local probe storage) device described by P. Vettiger et al. is an example of a typical MEMS device, see "The Millipede”-More than one thousand tips for future AFM data storage. Such devices typically include a storage surface with a locally deformable thin film disposed thereon; and an array of micromechanical probe sensors each having an atomic-sized probe tip facing the coating. ). In operation, the tip is brought close to the storage surface during data write operations. Energy is applied selectively to each tip, typically in the form of heat. Energy applied to the tip is transferred to the storage surface. This transfer of energy produces local deformations on the storage su...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): B81B3/00G12B21/02G11B9/12G01Q60/58G11B9/00
CPCG01Q60/58B82Y10/00G11B9/1418B82Y35/00
Inventor 格尔德·K·宾尼格米歇尔·德斯庞特马克·A·兰茨彼得·维蒂格
Owner INT BUSINESS MASCH CORP
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