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Microlongitudinal driver

A driver, longitudinal technology, applied in the direction of generator/motor, electrostatic generator/motor, electrical components, etc., can solve the problem that the precious space of MEMS devices cannot be fully utilized

Inactive Publication Date: 2009-11-18
NORTHWESTERN POLYTECHNICAL UNIV
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, the existence of the pull-in phenomenon in the electrostatic attraction driver makes the effective driving stroke only reach about 1 / 3 of the initial distance between the plates, that is, the effective driving stroke of the driver is only about 0.667 μm, and the precious space of the MEMS device cannot be fully utilized.

Method used

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Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0016] Embodiment 1: The micro longitudinal driver is mainly composed of a base 11 , an upper plate 9 , a comb electrode array, an upper fixed comb anchor 15 , a support beam anchor 19 and a support beam 1 . The comb-teeth electrode array is located on the four sides of the upper plate 9 , and the upper plate 9 is supported by four support beams 1 located at the four corners of the upper plate 9 and suspended on the base 11 . The electrostatic repelling comb electrode array is composed of upper fixed comb 5 , movable comb 3 and lower fixed comb 7 . Wherein, the two ends of the upper fixed comb 5 are fixed on the upper fixed comb connecting plate 17 through the upper fixed comb anchor point 15, and there is a gap between the end close to the upper pole plate 9 and the upper pole plate 9 in the horizontal direction; One end of the comb teeth 3 is connected to the upper pole plate 9, and the other end is suspended on the base 11; the lower fixed comb teeth 7 are located side by s...

Embodiment 2

[0017] Embodiment 2: The micro longitudinal driver is mainly composed of a base 11 , an upper plate 9 , a comb electrode array, an upper fixed comb anchor point 15 , a support beam anchor point 19 and a support beam 1 . The comb-teeth electrode array is located on two opposite sides of the upper pole plate 9, and the upper pole plate 9 is supported by four support beams 1 positioned at the four corners of the upper pole plate 9, and is suspended on the base 11, and the four support beams 1 are connected with the comb The teeth electrodes are parallel, that is, perpendicular to the edge of the upper plate 9 where the comb-tooth electrode array is located. The electrostatic repelling comb electrode array is composed of upper fixed comb 5 , movable comb 3 and lower fixed comb 7 . Wherein, the two ends of the upper fixed comb 5 are fixed on the upper fixed comb connecting plate 17 through the upper fixed comb anchor point 15, and there is a gap between the end close to the upper p...

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PUM

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Abstract

The invention discloses a miniature longitudinal driver, which is characterized in that: the upper pole plate is supported by elastic beams located on the four corners of the upper pole plate, and the movement of the upper pole plate is controlled by two upper and lower comb teeth respectively located between the upper pole plate and the base Driven by the electrostatic repulsion of the upper and lower combs, the fixed combs with opposite polarities to the upper and lower combs are interlaced with the upper combs and located on the same plane as the upper plate, so that the upper and lower surfaces of the movable combs on the upper plate The greater the difference in electrostatic force, the greater the net repulsion force, and a greater driving stroke can be obtained at a lower driving voltage. The micro-longitudinal driver proposed by the present invention has a simple structure and a novel design method, and can be processed by standard MUMPs surface technology, which effectively increases the difference between the electrostatic force applied to the upper and lower surfaces of the movable comb electrode, that is, the net repulsion force, and promotes the micro-static drive. Application and development in MEMS field.

Description

technical field [0001] The invention relates to a miniature driver, in particular to an electrostatic repulsion miniature longitudinal driver capable of increasing the driving stroke. Background technique [0002] The driving mode of the miniature electrostatic driver is divided into two types: electrostatic attraction and electrostatic repulsion. The processing method adopts the standard multi-user MEMS process, which can be mass-produced and reduce costs. This process makes the initial distance between the upper and lower plates 2μm. However, due to the pull-in phenomenon in the electrostatic attraction driver, the effective driving stroke can only reach about 1 / 3 of the initial distance between the plates, that is, the effective driving stroke of the driver is only about 0.667 μm, and the precious space of MEMS devices cannot be fully utilized. [0003] refer to Figure 4 . The document "Large-Stroke Microelectrostatic Actuators for Vertical Translation of Micromirrors U...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): H02N1/00
Inventor 乔大勇苑伟政马志波李晓莹李开成吕湘连
Owner NORTHWESTERN POLYTECHNICAL UNIV