Apparatus for reducing sensitivity of an article to mechanical shock
A mechanical vibration, sensitive technology, applied in mechanical equipment, nanotechnology for information processing, poor vibration/sound insulation/absorption, etc., can solve problems such as mechanical vibration is very sensitive
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[0033] combined reference figure 1 with 2 , an example of a locally detected data storage device includes a two-dimensional array of cantilever sensors 10 disposed on a silicon substrate 90 . Row conductors 30 and column conductors 40 are also provided on the substrate. Each sensor 10 is addressed by a different combination of row 30 and column 40 conductors. There is a pair of column conductors 40 associated with each column of sensors 10 and one row conductor associated with each row of sensors 10 . Each sensor 10 comprises a silicon cantilever structure with a length of around 70 microns and a micron thickness. The ends of the cantilever legs are fixed to the substrate 90 . The apex of the cantilever has a degree of freedom of movement in a direction perpendicular to the substrate 90 . The cantilever apex carries a resistive heating element and a silicon tip facing away from the substrate 90 . The legs of the cantilever are highly doped to provide a conductive path. ...
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