Heat treatment apparatus

Abstract

The object of the invention is to prevent gas flow from a first soaking area to the other area in a conveying path, and to keep high cleanliness over the whole conveying path. An exhaust box 6 and a first introduction pipe 7 are disposed in a first temperature rising area 51 and the first soaking area 52. The exhaust box 6 can discharge the gas generated from a treated object by heating in the first soaking area. The first introduction pipe 7 introduces the clean air to the first soaking area 51. A plurality of second introduction pipes 4 are arranged at an upper part of a conveying roller 2 along the conveying path 5 in a state that the direction orthogonal to the conveying path 5 is the longitudinal direction in a second temperature rising area 53, a second soaking area 54, a cold removal area 55 and a cooling area 56 as the areas excluding the first temperature rising area 51 and the first soaking area 52, in the conveying path 5. The second introduction pipe 4 introduces the cleanair to the area excluding the first temperature rising area 51 and the first soaking area 52.

Description

technical field [0001] The present invention relates to a heat treatment device, in particular to a heat treatment device for performing heat treatment such as heat treatment, slow cooling treatment and cooling treatment in a hollow transport path during the firing process of a glass substrate for a plasma display. Background technique [0002] In the firing process of the processed object such as the glass substrate for plasma display, heat treatment such as heating treatment, slow cooling treatment and cooling treatment are performed in the hollow conveyance path. In the heat treatment apparatus used for this heat treatment, a heat-insulating material outer wall member is covered on four surfaces of the upper surface, the lower surface, and the left and right sides to form a hollow conveyance path. A heater for heating the conveyance path to a predetermined temperature is disposed on at least a part of the upper surface of the conveyance path. [0003] Treated objects suc...

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Problems solved by technology

[0007] Therefore, in areas other than the first heating zone and the first soaking zone in the transport path, sublimates will adhere to the object to be processed, causing defects in the object to be processed.

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